10/11/2011	9:48:18 AM	Main Vac valve closed
10/11/2011	9:48:30 AM	Main Vac valve opened
10/11/2011	9:59:16 AM	Main Vac valve closed
10/11/2011	9:59:38 AM	Main Vac valve opened
10/11/2011	10:01:28 AM	Main Vac valve closed
10/11/2011	10:01:45 AM	Main Vac valve opened
10/11/2011	10:19:20 AM	Main Vac valve closed
10/11/2011	10:20:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	10:20:41 AM	Recipe started at 10:20 AM
10/11/2011	10:20:41 AM	Helium valve closed
10/11/2011	10:20:41 AM	H2 valve closed
10/11/2011	10:20:41 AM	BCl3 valve closed
10/11/2011	10:20:41 AM	PH3 valve closed
10/11/2011	10:20:41 AM	SiCl4 pre valve closed
10/11/2011	10:20:41 AM	SiCl4 post valve closed
10/11/2011	10:20:41 AM	Main Vac valve closed
10/11/2011	10:20:41 AM	Bypass valve closed
10/11/2011	10:20:41 AM	Bubbler valve closed
10/11/2011	10:20:41 AM	Helium MFC set to  0.000000
10/11/2011	10:20:41 AM	H2 MFC set to  0.000000
10/11/2011	10:20:41 AM	BCl3 MFC set to  0.000000
10/11/2011	10:20:41 AM	PHl3 MFC set to  0.000000
10/11/2011	10:20:41 AM	SiCl4 MFC set to  0.000000
10/11/2011	10:20:41 AM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:20:41 AM	Tube furnace set to 0
10/11/2011	10:20:44 AM	H2 valve closed
10/11/2011	10:20:44 AM	BCl3 valve closed
10/11/2011	10:20:44 AM	PH3 valve closed
10/11/2011	10:20:44 AM	SiCl4 pre valve closed
10/11/2011	10:20:44 AM	SiCl4 post valve closed
10/11/2011	10:20:44 AM	Main Vac valve closed
10/11/2011	10:20:44 AM	Bypass valve closed
10/11/2011	10:20:44 AM	Bubbler valve closed
10/11/2011	10:20:44 AM	Helium valve opened
10/11/2011	10:20:44 AM	Helium MFC set to  500.000000
10/11/2011	10:20:44 AM	H2 MFC set to  0.000000
10/11/2011	10:20:44 AM	BCl3 MFC set to  0.000000
10/11/2011	10:20:44 AM	PHl3 MFC set to  0.000000
10/11/2011	10:20:44 AM	SiCl4 MFC set to  0.000000
10/11/2011	10:20:44 AM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:20:45 AM	Tube furnace set to 0
10/11/2011	10:21:51 AM	Helium valve closed
10/11/2011	10:21:51 AM	H2 valve closed
10/11/2011	10:21:51 AM	BCl3 valve closed
10/11/2011	10:21:51 AM	PH3 valve closed
10/11/2011	10:21:51 AM	SiCl4 pre valve closed
10/11/2011	10:21:51 AM	SiCl4 post valve closed
10/11/2011	10:21:51 AM	Main Vac valve closed
10/11/2011	10:21:51 AM	Bypass valve closed
10/11/2011	10:21:51 AM	Bubbler valve closed
10/11/2011	10:21:51 AM	Helium MFC set to  0.000000
10/11/2011	10:21:51 AM	H2 MFC set to  0.000000
10/11/2011	10:21:51 AM	BCl3 MFC set to  0.000000
10/11/2011	10:21:51 AM	PHl3 MFC set to  0.000000
10/11/2011	10:21:51 AM	SiCl4 MFC set to  0.000000
10/11/2011	10:21:51 AM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:21:51 AM	Tube furnace set to 0
10/11/2011	10:21:52 AM	Run finished at 10:21 AM
10/11/2011	10:21:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	10:31:33 AM	Tube furnace set to 100
10/11/2011	10:31:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	10:31:35 AM	Recipe started at 10:31 AM
10/11/2011	10:31:35 AM	Helium valve closed
10/11/2011	10:31:35 AM	H2 valve closed
10/11/2011	10:31:35 AM	BCl3 valve closed
10/11/2011	10:31:35 AM	PH3 valve closed
10/11/2011	10:31:35 AM	SiCl4 pre valve closed
10/11/2011	10:31:35 AM	SiCl4 post valve closed
10/11/2011	10:31:35 AM	Main Vac valve closed
10/11/2011	10:31:35 AM	Bubbler valve closed
10/11/2011	10:31:35 AM	Bypass valve opened
10/11/2011	10:31:35 AM	Helium MFC set to  0.000000
10/11/2011	10:31:35 AM	H2 MFC set to  0.000000
10/11/2011	10:31:35 AM	BCl3 MFC set to  0.000000
10/11/2011	10:31:35 AM	PHl3 MFC set to  0.000000
10/11/2011	10:31:35 AM	SiCl4 MFC set to  0.000000
10/11/2011	10:31:35 AM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:31:35 AM	Tube furnace set to 0
10/11/2011	10:33:30 AM	Helium valve closed
10/11/2011	10:33:30 AM	H2 valve closed
10/11/2011	10:33:30 AM	BCl3 valve closed
10/11/2011	10:33:30 AM	PH3 valve closed
10/11/2011	10:33:30 AM	SiCl4 pre valve closed
10/11/2011	10:33:30 AM	SiCl4 post valve closed
10/11/2011	10:33:30 AM	Main Vac valve closed
10/11/2011	10:33:30 AM	Bubbler valve closed
10/11/2011	10:33:30 AM	Bypass valve opened
10/11/2011	10:33:30 AM	Helium MFC set to  0.000000
10/11/2011	10:33:30 AM	H2 MFC set to  0.000000
10/11/2011	10:33:30 AM	BCl3 MFC set to  0.000000
10/11/2011	10:33:30 AM	PHl3 MFC set to  0.000000
10/11/2011	10:33:30 AM	SiCl4 MFC set to  0.000000
10/11/2011	10:33:30 AM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:33:30 AM	Tube furnace set to 0
10/11/2011	10:34:30 AM	Helium valve closed
10/11/2011	10:34:30 AM	H2 valve closed
10/11/2011	10:34:30 AM	BCl3 valve closed
10/11/2011	10:34:30 AM	PH3 valve closed
10/11/2011	10:34:30 AM	SiCl4 pre valve closed
10/11/2011	10:34:30 AM	SiCl4 post valve closed
10/11/2011	10:34:30 AM	Bypass valve closed
10/11/2011	10:34:30 AM	Bubbler valve closed
10/11/2011	10:34:30 AM	Main Vac valve opened
10/11/2011	10:34:30 AM	Helium MFC set to  0.000000
10/11/2011	10:34:30 AM	H2 MFC set to  0.000000
10/11/2011	10:34:30 AM	BCl3 MFC set to  0.000000
10/11/2011	10:34:30 AM	PHl3 MFC set to  0.000000
10/11/2011	10:34:30 AM	SiCl4 MFC set to  0.000000
10/11/2011	10:34:30 AM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:34:31 AM	Tube furnace set to 0
10/11/2011	10:34:32 AM	Run finished at 10:34 AM
10/11/2011	10:34:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	10:51:34 AM	Main Vac valve closed
10/11/2011	10:51:47 AM	Main Vac valve opened
10/11/2011	10:52:35 AM	Main Vac valve closed
10/11/2011	10:52:47 AM	Main Vac valve opened
10/11/2011	10:53:35 AM	Tube furnace set to 150
10/11/2011	11:06:32 AM	Main Vac valve closed
10/11/2011	11:06:45 AM	Main Vac valve opened
10/11/2011	11:07:13 AM	Helium MFC set to  10.000000
10/11/2011	11:07:18 AM	Helium valve opened
10/11/2011	11:09:11 AM	Helium valve closed
10/11/2011	11:09:14 AM	Helium MFC set to  10.000000
10/11/2011	11:09:42 AM	Main Vac valve closed
10/11/2011	11:09:56 AM	Main Vac valve opened
10/11/2011	11:10:20 AM	Helium valve opened
10/11/2011	11:10:54 AM	Tube furnace set to 0
10/11/2011	11:11:11 AM	Helium valve closed
10/11/2011	11:11:55 AM	Main Vac valve closed
10/11/2011	11:12:09 AM	Main Vac valve opened
10/11/2011	11:12:32 AM	Tube furnace set to 150
10/11/2011	11:26:03 AM	Main Vac valve closed
10/11/2011	11:26:29 AM	Main Vac valve opened
10/11/2011	11:35:29 AM	Helium valve opened
10/11/2011	11:35:46 AM	Helium valve closed
10/11/2011	11:36:13 AM	Main Vac valve closed
10/11/2011	11:36:36 AM	Main Vac valve opened
10/11/2011	11:40:35 AM	Main Vac valve closed
10/11/2011	11:41:02 AM	Main Vac valve opened
10/11/2011	11:42:22 AM	Main Vac valve closed
10/11/2011	11:42:39 AM	Main Vac valve opened
10/11/2011	11:43:10 AM	Main Vac valve closed
10/11/2011	11:43:35 AM	Main Vac valve opened
10/11/2011	11:47:13 AM	Tube furnace set to 100
10/11/2011	11:52:34 AM	Main Vac valve closed
10/11/2011	11:52:43 AM	Main Vac valve opened
10/11/2011	11:53:55 AM	Helium MFC set to  0.000000
10/11/2011	11:54:56 AM	Main Vac valve closed
10/11/2011	11:55:06 AM	Main Vac valve opened
10/11/2011	11:57:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	11:57:54 AM	Recipe started at 11:57 AM
10/11/2011	11:57:54 AM	Helium valve closed
10/11/2011	11:57:54 AM	H2 valve closed
10/11/2011	11:57:54 AM	BCl3 valve closed
10/11/2011	11:57:54 AM	PH3 valve closed
10/11/2011	11:57:54 AM	SiCl4 pre valve closed
10/11/2011	11:57:54 AM	SiCl4 post valve closed
10/11/2011	11:57:54 AM	Main Vac valve closed
10/11/2011	11:57:54 AM	Bypass valve closed
10/11/2011	11:57:54 AM	Bubbler valve closed
10/11/2011	11:57:54 AM	Helium MFC set to  0.000000
10/11/2011	11:57:54 AM	H2 MFC set to  0.000000
10/11/2011	11:57:54 AM	BCl3 MFC set to  0.000000
10/11/2011	11:57:54 AM	PHl3 MFC set to  0.000000
10/11/2011	11:57:54 AM	SiCl4 MFC set to  0.000000
10/11/2011	11:57:54 AM	Bypass solenoid MFC set to  0.000000
10/11/2011	11:57:54 AM	Tube furnace set to 0
10/11/2011	11:57:57 AM	H2 valve closed
10/11/2011	11:57:57 AM	BCl3 valve closed
10/11/2011	11:57:57 AM	PH3 valve closed
10/11/2011	11:57:57 AM	SiCl4 pre valve closed
10/11/2011	11:57:57 AM	SiCl4 post valve closed
10/11/2011	11:57:57 AM	Main Vac valve closed
10/11/2011	11:57:57 AM	Bypass valve closed
10/11/2011	11:57:57 AM	Bubbler valve closed
10/11/2011	11:57:57 AM	Helium valve opened
10/11/2011	11:57:57 AM	Helium MFC set to  500.000000
10/11/2011	11:57:57 AM	H2 MFC set to  0.000000
10/11/2011	11:57:57 AM	BCl3 MFC set to  0.000000
10/11/2011	11:57:57 AM	PHl3 MFC set to  0.000000
10/11/2011	11:57:57 AM	SiCl4 MFC set to  0.000000
10/11/2011	11:57:57 AM	Bypass solenoid MFC set to  0.000000
10/11/2011	11:57:57 AM	Tube furnace set to 0
10/11/2011	11:58:59 AM	Helium valve closed
10/11/2011	11:58:59 AM	H2 valve closed
10/11/2011	11:58:59 AM	BCl3 valve closed
10/11/2011	11:58:59 AM	PH3 valve closed
10/11/2011	11:58:59 AM	SiCl4 pre valve closed
10/11/2011	11:58:59 AM	SiCl4 post valve closed
10/11/2011	11:58:59 AM	Main Vac valve closed
10/11/2011	11:58:59 AM	Bypass valve closed
10/11/2011	11:58:59 AM	Bubbler valve closed
10/11/2011	11:58:59 AM	Helium MFC set to  0.000000
10/11/2011	11:58:59 AM	H2 MFC set to  0.000000
10/11/2011	11:58:59 AM	BCl3 MFC set to  0.000000
10/11/2011	11:58:59 AM	PHl3 MFC set to  0.000000
10/11/2011	11:58:59 AM	SiCl4 MFC set to  0.000000
10/11/2011	11:58:59 AM	Bypass solenoid MFC set to  0.000000
10/11/2011	11:58:59 AM	Tube furnace set to 0
10/11/2011	11:59:00 AM	Run finished at 11:59 AM
10/11/2011	11:59:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	12:07:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	12:07:24 PM	Recipe started at 12:07 PM
10/11/2011	12:07:24 PM	Helium valve closed
10/11/2011	12:07:24 PM	H2 valve closed
10/11/2011	12:07:24 PM	BCl3 valve closed
10/11/2011	12:07:24 PM	PH3 valve closed
10/11/2011	12:07:24 PM	SiCl4 pre valve closed
10/11/2011	12:07:24 PM	SiCl4 post valve closed
10/11/2011	12:07:24 PM	Main Vac valve closed
10/11/2011	12:07:24 PM	Bubbler valve closed
10/11/2011	12:07:24 PM	Bypass valve opened
10/11/2011	12:07:24 PM	Helium MFC set to  0.000000
10/11/2011	12:07:24 PM	H2 MFC set to  0.000000
10/11/2011	12:07:24 PM	BCl3 MFC set to  0.000000
10/11/2011	12:07:24 PM	PHl3 MFC set to  0.000000
10/11/2011	12:07:24 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:07:24 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	12:07:24 PM	Tube furnace set to 0
10/11/2011	12:08:10 PM	Run aborted at 12:08 PM
10/11/2011	12:08:10 PM	Helium valve closed
10/11/2011	12:08:10 PM	H2 valve closed
10/11/2011	12:08:10 PM	BCl3 valve closed
10/11/2011	12:08:10 PM	PH3 valve closed
10/11/2011	12:08:10 PM	SiCl4 pre valve closed
10/11/2011	12:08:10 PM	SiCl4 post valve closed
10/11/2011	12:08:10 PM	Bypass valve closed
10/11/2011	12:08:10 PM	Main Vac valve closed
10/11/2011	12:08:10 PM	Bubbler valve closed
10/11/2011	12:08:10 PM	Helium MFC set to  0.000000
10/11/2011	12:08:10 PM	H2 MFC set to  0.000000
10/11/2011	12:08:10 PM	BCl3 MFC set to  0.000000
10/11/2011	12:08:10 PM	PHl3 MFC set to  0.000000
10/11/2011	12:08:10 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:08:10 PM	Tube furnace set to 0
10/11/2011	12:08:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	12:09:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	12:09:31 PM	Recipe started at 12:09 PM
10/11/2011	12:09:31 PM	Helium valve closed
10/11/2011	12:09:31 PM	H2 valve closed
10/11/2011	12:09:31 PM	BCl3 valve closed
10/11/2011	12:09:31 PM	PH3 valve closed
10/11/2011	12:09:31 PM	SiCl4 pre valve closed
10/11/2011	12:09:31 PM	SiCl4 post valve closed
10/11/2011	12:09:31 PM	Main Vac valve closed
10/11/2011	12:09:31 PM	Bubbler valve closed
10/11/2011	12:09:31 PM	Bypass valve opened
10/11/2011	12:09:31 PM	Helium MFC set to  0.000000
10/11/2011	12:09:31 PM	H2 MFC set to  0.000000
10/11/2011	12:09:31 PM	BCl3 MFC set to  0.000000
10/11/2011	12:09:31 PM	PHl3 MFC set to  0.000000
10/11/2011	12:09:31 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:09:31 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	12:09:32 PM	Tube furnace set to 0
10/11/2011	12:09:55 PM	Run aborted at 12:09 PM
10/11/2011	12:09:55 PM	Helium valve closed
10/11/2011	12:09:55 PM	H2 valve closed
10/11/2011	12:09:55 PM	BCl3 valve closed
10/11/2011	12:09:55 PM	PH3 valve closed
10/11/2011	12:09:55 PM	SiCl4 pre valve closed
10/11/2011	12:09:55 PM	SiCl4 post valve closed
10/11/2011	12:09:55 PM	Bypass valve closed
10/11/2011	12:09:55 PM	Main Vac valve closed
10/11/2011	12:09:55 PM	Bubbler valve closed
10/11/2011	12:09:55 PM	Helium MFC set to  0.000000
10/11/2011	12:09:55 PM	H2 MFC set to  0.000000
10/11/2011	12:09:55 PM	BCl3 MFC set to  0.000000
10/11/2011	12:09:55 PM	PHl3 MFC set to  0.000000
10/11/2011	12:09:55 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:09:55 PM	Tube furnace set to 0
10/11/2011	12:09:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	12:12:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	12:12:40 PM	Recipe started at 12:12 PM
10/11/2011	12:12:40 PM	Helium valve closed
10/11/2011	12:12:40 PM	H2 valve closed
10/11/2011	12:12:40 PM	BCl3 valve closed
10/11/2011	12:12:40 PM	PH3 valve closed
10/11/2011	12:12:40 PM	SiCl4 pre valve closed
10/11/2011	12:12:40 PM	SiCl4 post valve closed
10/11/2011	12:12:40 PM	Main Vac valve closed
10/11/2011	12:12:40 PM	Bubbler valve closed
10/11/2011	12:12:40 PM	Bypass valve opened
10/11/2011	12:12:40 PM	Helium MFC set to  0.000000
10/11/2011	12:12:40 PM	H2 MFC set to  0.000000
10/11/2011	12:12:40 PM	BCl3 MFC set to  0.000000
10/11/2011	12:12:40 PM	PHl3 MFC set to  0.000000
10/11/2011	12:12:40 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:12:40 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	12:12:40 PM	Tube furnace set to 0
10/11/2011	12:13:12 PM	Run aborted at 12:13 PM
10/11/2011	12:13:12 PM	Helium valve closed
10/11/2011	12:13:12 PM	H2 valve closed
10/11/2011	12:13:12 PM	BCl3 valve closed
10/11/2011	12:13:12 PM	PH3 valve closed
10/11/2011	12:13:12 PM	SiCl4 pre valve closed
10/11/2011	12:13:12 PM	SiCl4 post valve closed
10/11/2011	12:13:12 PM	Bypass valve closed
10/11/2011	12:13:12 PM	Main Vac valve closed
10/11/2011	12:13:12 PM	Bubbler valve closed
10/11/2011	12:13:12 PM	Helium MFC set to  0.000000
10/11/2011	12:13:12 PM	H2 MFC set to  0.000000
10/11/2011	12:13:12 PM	BCl3 MFC set to  0.000000
10/11/2011	12:13:12 PM	PHl3 MFC set to  0.000000
10/11/2011	12:13:12 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:13:13 PM	Tube furnace set to 0
10/11/2011	12:13:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	12:15:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	12:15:36 PM	Recipe started at 12:15 PM
10/11/2011	12:15:36 PM	Helium valve closed
10/11/2011	12:15:36 PM	H2 valve closed
10/11/2011	12:15:36 PM	BCl3 valve closed
10/11/2011	12:15:36 PM	PH3 valve closed
10/11/2011	12:15:36 PM	SiCl4 pre valve closed
10/11/2011	12:15:36 PM	SiCl4 post valve closed
10/11/2011	12:15:36 PM	Main Vac valve closed
10/11/2011	12:15:36 PM	Bubbler valve closed
10/11/2011	12:15:36 PM	Bypass valve opened
10/11/2011	12:15:36 PM	Helium MFC set to  0.000000
10/11/2011	12:15:36 PM	H2 MFC set to  0.000000
10/11/2011	12:15:36 PM	BCl3 MFC set to  0.000000
10/11/2011	12:15:36 PM	PHl3 MFC set to  0.000000
10/11/2011	12:15:36 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:15:36 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	12:15:36 PM	Tube furnace set to 0
10/11/2011	12:17:25 PM	Helium valve closed
10/11/2011	12:17:25 PM	H2 valve closed
10/11/2011	12:17:25 PM	BCl3 valve closed
10/11/2011	12:17:25 PM	PH3 valve closed
10/11/2011	12:17:25 PM	SiCl4 pre valve closed
10/11/2011	12:17:25 PM	SiCl4 post valve closed
10/11/2011	12:17:25 PM	Main Vac valve closed
10/11/2011	12:17:25 PM	Bubbler valve closed
10/11/2011	12:17:25 PM	Bypass valve opened
10/11/2011	12:17:25 PM	Helium MFC set to  0.000000
10/11/2011	12:17:25 PM	H2 MFC set to  0.000000
10/11/2011	12:17:25 PM	BCl3 MFC set to  0.000000
10/11/2011	12:17:25 PM	PHl3 MFC set to  0.000000
10/11/2011	12:17:25 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:17:25 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	12:17:25 PM	Tube furnace set to 0
10/11/2011	12:17:48 PM	Helium valve closed
10/11/2011	12:17:48 PM	H2 valve closed
10/11/2011	12:17:48 PM	BCl3 valve closed
10/11/2011	12:17:48 PM	PH3 valve closed
10/11/2011	12:17:48 PM	SiCl4 pre valve closed
10/11/2011	12:17:48 PM	SiCl4 post valve closed
10/11/2011	12:17:48 PM	Bypass valve closed
10/11/2011	12:17:48 PM	Bubbler valve closed
10/11/2011	12:17:48 PM	Main Vac valve opened
10/11/2011	12:17:48 PM	Helium MFC set to  0.000000
10/11/2011	12:17:48 PM	H2 MFC set to  0.000000
10/11/2011	12:17:48 PM	BCl3 MFC set to  0.000000
10/11/2011	12:17:48 PM	PHl3 MFC set to  0.000000
10/11/2011	12:17:48 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:17:48 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	12:17:48 PM	Tube furnace set to 0
10/11/2011	12:17:49 PM	Run finished at 12:17 PM
10/11/2011	12:17:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	12:19:34 PM	Main Vac valve closed
10/11/2011	12:28:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	12:28:23 PM	Recipe started at 12:28 PM
10/11/2011	12:28:23 PM	Helium valve closed
10/11/2011	12:28:23 PM	H2 valve closed
10/11/2011	12:28:23 PM	BCl3 valve closed
10/11/2011	12:28:23 PM	PH3 valve closed
10/11/2011	12:28:23 PM	SiCl4 pre valve closed
10/11/2011	12:28:23 PM	SiCl4 post valve closed
10/11/2011	12:28:23 PM	Main Vac valve closed
10/11/2011	12:28:23 PM	Bubbler valve closed
10/11/2011	12:28:23 PM	Bypass valve opened
10/11/2011	12:28:23 PM	Helium MFC set to  0.000000
10/11/2011	12:28:23 PM	H2 MFC set to  0.000000
10/11/2011	12:28:23 PM	BCl3 MFC set to  0.000000
10/11/2011	12:28:23 PM	PHl3 MFC set to  0.000000
10/11/2011	12:28:23 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:28:23 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	12:28:23 PM	Tube furnace set to 0
10/11/2011	12:30:22 PM	Helium valve closed
10/11/2011	12:30:22 PM	H2 valve closed
10/11/2011	12:30:22 PM	BCl3 valve closed
10/11/2011	12:30:22 PM	PH3 valve closed
10/11/2011	12:30:22 PM	SiCl4 pre valve closed
10/11/2011	12:30:22 PM	SiCl4 post valve closed
10/11/2011	12:30:22 PM	Main Vac valve closed
10/11/2011	12:30:22 PM	Bubbler valve closed
10/11/2011	12:30:22 PM	Bypass valve opened
10/11/2011	12:30:22 PM	Helium MFC set to  0.000000
10/11/2011	12:30:22 PM	H2 MFC set to  0.000000
10/11/2011	12:30:22 PM	BCl3 MFC set to  0.000000
10/11/2011	12:30:22 PM	PHl3 MFC set to  0.000000
10/11/2011	12:30:22 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:30:22 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	12:30:22 PM	Tube furnace set to 0
10/11/2011	12:30:53 PM	Helium valve closed
10/11/2011	12:30:53 PM	H2 valve closed
10/11/2011	12:30:53 PM	BCl3 valve closed
10/11/2011	12:30:53 PM	PH3 valve closed
10/11/2011	12:30:53 PM	SiCl4 pre valve closed
10/11/2011	12:30:53 PM	SiCl4 post valve closed
10/11/2011	12:30:53 PM	Bypass valve closed
10/11/2011	12:30:53 PM	Bubbler valve closed
10/11/2011	12:30:53 PM	Main Vac valve opened
10/11/2011	12:30:53 PM	Helium MFC set to  0.000000
10/11/2011	12:30:53 PM	H2 MFC set to  0.000000
10/11/2011	12:30:53 PM	BCl3 MFC set to  0.000000
10/11/2011	12:30:53 PM	PHl3 MFC set to  0.000000
10/11/2011	12:30:53 PM	SiCl4 MFC set to  0.000000
10/11/2011	12:30:53 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	12:30:53 PM	Tube furnace set to 0
10/11/2011	12:30:54 PM	Run finished at 12:30 PM
10/11/2011	12:30:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	12:31:34 PM	Main Vac valve closed
10/11/2011	12:31:40 PM	Main Vac valve opened
10/11/2011	1:02:35 PM	Main Vac valve closed
10/11/2011	1:02:41 PM	Main Vac valve opened
10/11/2011	1:03:07 PM	Main Vac valve closed
10/11/2011	1:03:28 PM	Main Vac valve opened
10/11/2011	1:03:36 PM	Tube furnace set to 100
10/11/2011	1:10:11 PM	Main Vac valve closed
10/11/2011	1:10:33 PM	Main Vac valve opened
10/11/2011	1:11:28 PM	Helium MFC set to  10.000000
10/11/2011	1:11:30 PM	Helium valve opened
10/11/2011	1:14:26 PM	Helium valve closed
10/11/2011	1:15:01 PM	Main Vac valve closed
10/11/2011	1:15:23 PM	Main Vac valve opened
10/11/2011	1:20:04 PM	Helium valve opened
10/11/2011	1:21:10 PM	Helium valve closed
10/11/2011	1:21:13 PM	Helium MFC set to  0.000000
10/11/2011	1:21:27 PM	Tube furnace set to 200
10/11/2011	1:22:02 PM	Main Vac valve closed
10/11/2011	1:22:25 PM	Main Vac valve opened
10/11/2011	1:23:06 PM	Recipe started at 1:23 PM
10/11/2011	1:23:06 PM	Helium valve closed
10/11/2011	1:23:06 PM	H2 valve closed
10/11/2011	1:23:06 PM	BCl3 valve closed
10/11/2011	1:23:06 PM	PH3 valve closed
10/11/2011	1:23:06 PM	SiCl4 pre valve closed
10/11/2011	1:23:06 PM	SiCl4 post valve closed
10/11/2011	1:23:06 PM	Main Vac valve closed
10/11/2011	1:23:06 PM	Bypass valve closed
10/11/2011	1:23:06 PM	Bubbler valve closed
10/11/2011	1:23:06 PM	Helium MFC set to  0.000000
10/11/2011	1:23:06 PM	H2 MFC set to  0.000000
10/11/2011	1:23:06 PM	BCl3 MFC set to  0.000000
10/11/2011	1:23:06 PM	PHl3 MFC set to  0.000000
10/11/2011	1:23:06 PM	SiCl4 MFC set to  0.000000
10/11/2011	1:23:06 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	1:23:06 PM	Tube furnace set to 0
10/11/2011	1:23:09 PM	Helium valve closed
10/11/2011	1:23:09 PM	BCl3 valve closed
10/11/2011	1:23:09 PM	PH3 valve closed
10/11/2011	1:23:09 PM	SiCl4 pre valve closed
10/11/2011	1:23:09 PM	SiCl4 post valve closed
10/11/2011	1:23:09 PM	Main Vac valve closed
10/11/2011	1:23:09 PM	Bypass valve closed
10/11/2011	1:23:09 PM	Bubbler valve closed
10/11/2011	1:23:09 PM	H2 valve opened
10/11/2011	1:23:09 PM	Helium MFC set to  0.000000
10/11/2011	1:23:09 PM	H2 MFC set to  500.000000
10/11/2011	1:23:09 PM	BCl3 MFC set to  0.000000
10/11/2011	1:23:09 PM	PHl3 MFC set to  0.000000
10/11/2011	1:23:09 PM	SiCl4 MFC set to  0.000000
10/11/2011	1:23:09 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	1:23:09 PM	Tube furnace set to 0
10/11/2011	1:24:12 PM	Helium valve closed
10/11/2011	1:24:12 PM	BCl3 valve closed
10/11/2011	1:24:12 PM	PH3 valve closed
10/11/2011	1:24:12 PM	SiCl4 pre valve closed
10/11/2011	1:24:12 PM	SiCl4 post valve closed
10/11/2011	1:24:12 PM	Main Vac valve closed
10/11/2011	1:24:12 PM	Bypass valve closed
10/11/2011	1:24:12 PM	H2 valve opened
10/11/2011	1:24:12 PM	Bubbler valve opened
10/11/2011	1:24:12 PM	Helium MFC set to  0.000000
10/11/2011	1:24:12 PM	H2 MFC set to  500.000000
10/11/2011	1:24:12 PM	BCl3 MFC set to  0.000000
10/11/2011	1:24:12 PM	PHl3 MFC set to  0.000000
10/11/2011	1:24:12 PM	SiCl4 MFC set to  0.000000
10/11/2011	1:24:12 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	1:24:12 PM	Tube furnace set to 0
10/11/2011	1:24:13 PM	Helium valve closed
10/11/2011	1:24:13 PM	BCl3 valve closed
10/11/2011	1:24:13 PM	PH3 valve closed
10/11/2011	1:24:13 PM	SiCl4 pre valve closed
10/11/2011	1:24:13 PM	SiCl4 post valve closed
10/11/2011	1:24:13 PM	Main Vac valve closed
10/11/2011	1:24:13 PM	Bypass valve closed
10/11/2011	1:24:13 PM	H2 valve opened
10/11/2011	1:24:13 PM	Bubbler valve opened
10/11/2011	1:24:13 PM	Helium MFC set to  0.000000
10/11/2011	1:24:13 PM	H2 MFC set to  500.000000
10/11/2011	1:24:13 PM	BCl3 MFC set to  0.000000
10/11/2011	1:24:13 PM	PHl3 MFC set to  0.000000
10/11/2011	1:24:13 PM	SiCl4 MFC set to  0.000000
10/11/2011	1:24:13 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	1:24:13 PM	Tube furnace set to 1000
10/11/2011	1:46:13 PM	Helium valve closed
10/11/2011	1:46:13 PM	PH3 valve closed
10/11/2011	1:46:13 PM	Main Vac valve closed
10/11/2011	1:46:13 PM	Bypass valve closed
10/11/2011	1:46:13 PM	H2 valve opened
10/11/2011	1:46:13 PM	BCl3 valve opened
10/11/2011	1:46:13 PM	SiCl4 pre valve opened
10/11/2011	1:46:13 PM	SiCl4 post valve opened
10/11/2011	1:46:13 PM	Bubbler valve opened
10/11/2011	1:46:13 PM	Helium MFC set to  0.000000
10/11/2011	1:46:13 PM	H2 MFC set to  500.000000
10/11/2011	1:46:13 PM	BCl3 MFC set to  2.000000
10/11/2011	1:46:13 PM	PHl3 MFC set to  0.000000
10/11/2011	1:46:13 PM	SiCl4 MFC set to  50.000000
10/11/2011	1:46:13 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	1:46:13 PM	Tube furnace set to 1000
10/11/2011	1:56:13 PM	Helium valve closed
10/11/2011	1:56:13 PM	BCl3 valve closed
10/11/2011	1:56:13 PM	PH3 valve closed
10/11/2011	1:56:13 PM	SiCl4 pre valve closed
10/11/2011	1:56:13 PM	SiCl4 post valve closed
10/11/2011	1:56:13 PM	Main Vac valve closed
10/11/2011	1:56:13 PM	Bypass valve closed
10/11/2011	1:56:13 PM	H2 valve opened
10/11/2011	1:56:13 PM	Bubbler valve opened
10/11/2011	1:56:13 PM	Helium MFC set to  0.000000
10/11/2011	1:56:13 PM	H2 MFC set to  500.000000
10/11/2011	1:56:13 PM	BCl3 MFC set to  0.000000
10/11/2011	1:56:13 PM	PHl3 MFC set to  0.000000
10/11/2011	1:56:13 PM	SiCl4 MFC set to  0.000000
10/11/2011	1:56:13 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	1:56:14 PM	Tube furnace set to 750
10/11/2011	2:01:14 PM	H2 valve closed
10/11/2011	2:01:14 PM	BCl3 valve closed
10/11/2011	2:01:14 PM	PH3 valve closed
10/11/2011	2:01:14 PM	SiCl4 pre valve closed
10/11/2011	2:01:14 PM	SiCl4 post valve closed
10/11/2011	2:01:14 PM	Main Vac valve closed
10/11/2011	2:01:14 PM	Bypass valve closed
10/11/2011	2:01:14 PM	Helium valve opened
10/11/2011	2:01:14 PM	Bubbler valve opened
10/11/2011	2:01:14 PM	Helium MFC set to  400.000000
10/11/2011	2:01:14 PM	H2 MFC set to  0.000000
10/11/2011	2:01:14 PM	BCl3 MFC set to  0.000000
10/11/2011	2:01:14 PM	PHl3 MFC set to  0.000000
10/11/2011	2:01:14 PM	SiCl4 MFC set to  0.000000
10/11/2011	2:01:14 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	2:01:14 PM	Tube furnace set to 0
10/11/2011	2:21:14 PM	Helium valve closed
10/11/2011	2:21:14 PM	H2 valve closed
10/11/2011	2:21:14 PM	BCl3 valve closed
10/11/2011	2:21:14 PM	PH3 valve closed
10/11/2011	2:21:14 PM	SiCl4 pre valve closed
10/11/2011	2:21:14 PM	SiCl4 post valve closed
10/11/2011	2:21:14 PM	Main Vac valve closed
10/11/2011	2:21:14 PM	Bypass valve closed
10/11/2011	2:21:14 PM	Bubbler valve closed
10/11/2011	2:21:14 PM	Helium MFC set to  0.000000
10/11/2011	2:21:14 PM	H2 MFC set to  0.000000
10/11/2011	2:21:14 PM	BCl3 MFC set to  0.000000
10/11/2011	2:21:14 PM	PHl3 MFC set to  0.000000
10/11/2011	2:21:14 PM	SiCl4 MFC set to  0.000000
10/11/2011	2:21:14 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	2:21:14 PM	Tube furnace set to 0
10/11/2011	2:31:03 PM	Run finished at 2:31 PM
10/11/2011	2:31:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	2:31:06 PM	Recipe started at 2:31 PM
10/11/2011	2:31:06 PM	Helium valve closed
10/11/2011	2:31:06 PM	H2 valve closed
10/11/2011	2:31:06 PM	BCl3 valve closed
10/11/2011	2:31:06 PM	PH3 valve closed
10/11/2011	2:31:06 PM	SiCl4 pre valve closed
10/11/2011	2:31:06 PM	SiCl4 post valve closed
10/11/2011	2:31:06 PM	Main Vac valve closed
10/11/2011	2:31:06 PM	Bubbler valve closed
10/11/2011	2:31:06 PM	Bypass valve opened
10/11/2011	2:31:06 PM	Helium MFC set to  0.000000
10/11/2011	2:31:06 PM	H2 MFC set to  0.000000
10/11/2011	2:31:06 PM	BCl3 MFC set to  0.000000
10/11/2011	2:31:06 PM	PHl3 MFC set to  0.000000
10/11/2011	2:31:06 PM	SiCl4 MFC set to  0.000000
10/11/2011	2:31:06 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	2:31:06 PM	Tube furnace set to 0
10/11/2011	2:31:41 PM	Run aborted at 2:31 PM
10/11/2011	2:31:41 PM	Helium valve closed
10/11/2011	2:31:41 PM	H2 valve closed
10/11/2011	2:31:41 PM	BCl3 valve closed
10/11/2011	2:31:41 PM	PH3 valve closed
10/11/2011	2:31:41 PM	SiCl4 pre valve closed
10/11/2011	2:31:41 PM	SiCl4 post valve closed
10/11/2011	2:31:41 PM	Bypass valve closed
10/11/2011	2:31:41 PM	Main Vac valve closed
10/11/2011	2:31:41 PM	Bubbler valve closed
10/11/2011	2:31:41 PM	Helium MFC set to  0.000000
10/11/2011	2:31:41 PM	H2 MFC set to  0.000000
10/11/2011	2:31:41 PM	BCl3 MFC set to  0.000000
10/11/2011	2:31:41 PM	PHl3 MFC set to  0.000000
10/11/2011	2:31:41 PM	SiCl4 MFC set to  0.000000
10/11/2011	2:31:41 PM	Tube furnace set to 0
10/11/2011	2:31:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	2:31:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	2:31:44 PM	Recipe started at 2:31 PM
10/11/2011	2:31:44 PM	Helium valve closed
10/11/2011	2:31:44 PM	H2 valve closed
10/11/2011	2:31:44 PM	BCl3 valve closed
10/11/2011	2:31:44 PM	PH3 valve closed
10/11/2011	2:31:44 PM	SiCl4 pre valve closed
10/11/2011	2:31:44 PM	SiCl4 post valve closed
10/11/2011	2:31:44 PM	Main Vac valve closed
10/11/2011	2:31:44 PM	Bypass valve closed
10/11/2011	2:31:44 PM	Bubbler valve closed
10/11/2011	2:31:44 PM	Helium MFC set to  0.000000
10/11/2011	2:31:44 PM	H2 MFC set to  0.000000
10/11/2011	2:31:44 PM	BCl3 MFC set to  0.000000
10/11/2011	2:31:44 PM	PHl3 MFC set to  0.000000
10/11/2011	2:31:44 PM	SiCl4 MFC set to  0.000000
10/11/2011	2:31:44 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	2:31:44 PM	Tube furnace set to 0
10/11/2011	2:31:47 PM	H2 valve closed
10/11/2011	2:31:47 PM	BCl3 valve closed
10/11/2011	2:31:47 PM	PH3 valve closed
10/11/2011	2:31:47 PM	SiCl4 pre valve closed
10/11/2011	2:31:47 PM	SiCl4 post valve closed
10/11/2011	2:31:47 PM	Main Vac valve closed
10/11/2011	2:31:47 PM	Bypass valve closed
10/11/2011	2:31:47 PM	Bubbler valve closed
10/11/2011	2:31:47 PM	Helium valve opened
10/11/2011	2:31:47 PM	Helium MFC set to  500.000000
10/11/2011	2:31:47 PM	H2 MFC set to  0.000000
10/11/2011	2:31:47 PM	BCl3 MFC set to  0.000000
10/11/2011	2:31:47 PM	PHl3 MFC set to  0.000000
10/11/2011	2:31:47 PM	SiCl4 MFC set to  0.000000
10/11/2011	2:31:47 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	2:31:47 PM	Tube furnace set to 0
10/11/2011	2:32:51 PM	Helium valve closed
10/11/2011	2:32:51 PM	H2 valve closed
10/11/2011	2:32:51 PM	BCl3 valve closed
10/11/2011	2:32:51 PM	PH3 valve closed
10/11/2011	2:32:51 PM	SiCl4 pre valve closed
10/11/2011	2:32:51 PM	SiCl4 post valve closed
10/11/2011	2:32:51 PM	Main Vac valve closed
10/11/2011	2:32:51 PM	Bypass valve closed
10/11/2011	2:32:51 PM	Bubbler valve closed
10/11/2011	2:32:51 PM	Helium MFC set to  0.000000
10/11/2011	2:32:51 PM	H2 MFC set to  0.000000
10/11/2011	2:32:51 PM	BCl3 MFC set to  0.000000
10/11/2011	2:32:51 PM	PHl3 MFC set to  0.000000
10/11/2011	2:32:51 PM	SiCl4 MFC set to  0.000000
10/11/2011	2:32:51 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	2:32:51 PM	Tube furnace set to 0
10/11/2011	2:32:52 PM	Run finished at 2:32 PM
10/11/2011	2:32:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	2:37:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	2:37:13 PM	Recipe started at 2:37 PM
10/11/2011	2:37:13 PM	Helium valve closed
10/11/2011	2:37:13 PM	H2 valve closed
10/11/2011	2:37:13 PM	BCl3 valve closed
10/11/2011	2:37:13 PM	PH3 valve closed
10/11/2011	2:37:13 PM	SiCl4 pre valve closed
10/11/2011	2:37:13 PM	SiCl4 post valve closed
10/11/2011	2:37:13 PM	Main Vac valve closed
10/11/2011	2:37:13 PM	Bubbler valve closed
10/11/2011	2:37:13 PM	Bypass valve opened
10/11/2011	2:37:13 PM	Helium MFC set to  0.000000
10/11/2011	2:37:13 PM	H2 MFC set to  0.000000
10/11/2011	2:37:13 PM	BCl3 MFC set to  0.000000
10/11/2011	2:37:13 PM	PHl3 MFC set to  0.000000
10/11/2011	2:37:13 PM	SiCl4 MFC set to  0.000000
10/11/2011	2:37:13 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	2:37:13 PM	Tube furnace set to 0
10/11/2011	2:38:18 PM	Helium valve closed
10/11/2011	2:38:18 PM	H2 valve closed
10/11/2011	2:38:18 PM	BCl3 valve closed
10/11/2011	2:38:18 PM	PH3 valve closed
10/11/2011	2:38:18 PM	SiCl4 pre valve closed
10/11/2011	2:38:18 PM	SiCl4 post valve closed
10/11/2011	2:38:18 PM	Main Vac valve closed
10/11/2011	2:38:18 PM	Bubbler valve closed
10/11/2011	2:38:18 PM	Bypass valve opened
10/11/2011	2:38:18 PM	Helium MFC set to  0.000000
10/11/2011	2:38:18 PM	H2 MFC set to  0.000000
10/11/2011	2:38:18 PM	BCl3 MFC set to  0.000000
10/11/2011	2:38:18 PM	PHl3 MFC set to  0.000000
10/11/2011	2:38:18 PM	SiCl4 MFC set to  0.000000
10/11/2011	2:38:18 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	2:38:18 PM	Tube furnace set to 0
10/11/2011	2:39:18 PM	Helium valve closed
10/11/2011	2:39:18 PM	H2 valve closed
10/11/2011	2:39:18 PM	BCl3 valve closed
10/11/2011	2:39:18 PM	PH3 valve closed
10/11/2011	2:39:18 PM	SiCl4 pre valve closed
10/11/2011	2:39:18 PM	SiCl4 post valve closed
10/11/2011	2:39:18 PM	Bypass valve closed
10/11/2011	2:39:18 PM	Bubbler valve closed
10/11/2011	2:39:18 PM	Main Vac valve opened
10/11/2011	2:39:18 PM	Helium MFC set to  0.000000
10/11/2011	2:39:18 PM	H2 MFC set to  0.000000
10/11/2011	2:39:18 PM	BCl3 MFC set to  0.000000
10/11/2011	2:39:18 PM	PHl3 MFC set to  0.000000
10/11/2011	2:39:18 PM	SiCl4 MFC set to  0.000000
10/11/2011	2:39:18 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	2:39:18 PM	Tube furnace set to 0
10/11/2011	2:39:19 PM	Run finished at 2:39 PM
10/11/2011	2:39:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	3:06:58 PM	Main Vac valve closed
10/11/2011	3:07:19 PM	Main Vac valve opened
10/11/2011	3:07:40 PM	Tube furnace set to 150
10/11/2011	3:07:53 PM	Helium MFC set to  10.000000
10/11/2011	3:07:55 PM	Helium valve opened
10/11/2011	3:08:44 PM	Helium valve closed
10/11/2011	3:09:36 PM	Main Vac valve closed
10/11/2011	3:09:59 PM	Main Vac valve opened
10/11/2011	3:17:36 PM	Main Vac valve closed
10/11/2011	3:17:58 PM	Main Vac valve opened
10/11/2011	3:18:03 PM	Helium valve opened
10/11/2011	3:18:03 PM	Helium valve closed
10/11/2011	3:18:05 PM	Helium valve opened
10/11/2011	3:19:08 PM	Helium valve closed
10/11/2011	3:41:59 PM	Main Vac valve closed
10/11/2011	3:42:22 PM	Main Vac valve opened
10/11/2011	3:44:21 PM	Recipe started at 3:44 PM
10/11/2011	3:44:21 PM	Helium valve closed
10/11/2011	3:44:21 PM	H2 valve closed
10/11/2011	3:44:21 PM	BCl3 valve closed
10/11/2011	3:44:21 PM	PH3 valve closed
10/11/2011	3:44:21 PM	SiCl4 pre valve closed
10/11/2011	3:44:21 PM	SiCl4 post valve closed
10/11/2011	3:44:21 PM	Main Vac valve closed
10/11/2011	3:44:21 PM	Bypass valve closed
10/11/2011	3:44:21 PM	Bubbler valve closed
10/11/2011	3:44:21 PM	Helium MFC set to  0.000000
10/11/2011	3:44:21 PM	H2 MFC set to  0.000000
10/11/2011	3:44:21 PM	BCl3 MFC set to  0.000000
10/11/2011	3:44:21 PM	PHl3 MFC set to  0.000000
10/11/2011	3:44:21 PM	SiCl4 MFC set to  0.000000
10/11/2011	3:44:21 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	3:44:21 PM	Tube furnace set to 0
10/11/2011	3:44:24 PM	Helium valve closed
10/11/2011	3:44:24 PM	BCl3 valve closed
10/11/2011	3:44:24 PM	PH3 valve closed
10/11/2011	3:44:24 PM	SiCl4 pre valve closed
10/11/2011	3:44:24 PM	SiCl4 post valve closed
10/11/2011	3:44:24 PM	Main Vac valve closed
10/11/2011	3:44:24 PM	Bypass valve closed
10/11/2011	3:44:24 PM	Bubbler valve closed
10/11/2011	3:44:24 PM	H2 valve opened
10/11/2011	3:44:24 PM	Helium MFC set to  0.000000
10/11/2011	3:44:24 PM	H2 MFC set to  500.000000
10/11/2011	3:44:24 PM	BCl3 MFC set to  0.000000
10/11/2011	3:44:24 PM	PHl3 MFC set to  0.000000
10/11/2011	3:44:24 PM	SiCl4 MFC set to  0.000000
10/11/2011	3:44:24 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	3:44:25 PM	Tube furnace set to 0
10/11/2011	3:45:28 PM	Helium valve closed
10/11/2011	3:45:28 PM	BCl3 valve closed
10/11/2011	3:45:28 PM	PH3 valve closed
10/11/2011	3:45:28 PM	SiCl4 pre valve closed
10/11/2011	3:45:28 PM	SiCl4 post valve closed
10/11/2011	3:45:28 PM	Main Vac valve closed
10/11/2011	3:45:28 PM	Bypass valve closed
10/11/2011	3:45:28 PM	H2 valve opened
10/11/2011	3:45:28 PM	Bubbler valve opened
10/11/2011	3:45:28 PM	Helium MFC set to  0.000000
10/11/2011	3:45:28 PM	H2 MFC set to  500.000000
10/11/2011	3:45:28 PM	BCl3 MFC set to  0.000000
10/11/2011	3:45:28 PM	PHl3 MFC set to  0.000000
10/11/2011	3:45:28 PM	SiCl4 MFC set to  0.000000
10/11/2011	3:45:28 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	3:45:28 PM	Tube furnace set to 0
10/11/2011	3:45:29 PM	Helium valve closed
10/11/2011	3:45:29 PM	BCl3 valve closed
10/11/2011	3:45:29 PM	PH3 valve closed
10/11/2011	3:45:29 PM	SiCl4 pre valve closed
10/11/2011	3:45:29 PM	SiCl4 post valve closed
10/11/2011	3:45:29 PM	Main Vac valve closed
10/11/2011	3:45:29 PM	Bypass valve closed
10/11/2011	3:45:29 PM	H2 valve opened
10/11/2011	3:45:29 PM	Bubbler valve opened
10/11/2011	3:45:29 PM	Helium MFC set to  0.000000
10/11/2011	3:45:29 PM	H2 MFC set to  500.000000
10/11/2011	3:45:29 PM	BCl3 MFC set to  0.000000
10/11/2011	3:45:29 PM	PHl3 MFC set to  0.000000
10/11/2011	3:45:29 PM	SiCl4 MFC set to  0.000000
10/11/2011	3:45:29 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	3:45:29 PM	Tube furnace set to 1000
10/11/2011	4:07:29 PM	Helium valve closed
10/11/2011	4:07:29 PM	PH3 valve closed
10/11/2011	4:07:29 PM	Main Vac valve closed
10/11/2011	4:07:29 PM	Bypass valve closed
10/11/2011	4:07:29 PM	H2 valve opened
10/11/2011	4:07:29 PM	BCl3 valve opened
10/11/2011	4:07:29 PM	SiCl4 pre valve opened
10/11/2011	4:07:29 PM	SiCl4 post valve opened
10/11/2011	4:07:29 PM	Bubbler valve opened
10/11/2011	4:07:29 PM	Helium MFC set to  0.000000
10/11/2011	4:07:29 PM	H2 MFC set to  500.000000
10/11/2011	4:07:29 PM	BCl3 MFC set to  2.000000
10/11/2011	4:07:29 PM	PHl3 MFC set to  0.000000
10/11/2011	4:07:29 PM	SiCl4 MFC set to  50.000000
10/11/2011	4:07:29 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	4:07:30 PM	Tube furnace set to 1000
10/11/2011	4:17:30 PM	Helium valve closed
10/11/2011	4:17:30 PM	BCl3 valve closed
10/11/2011	4:17:30 PM	PH3 valve closed
10/11/2011	4:17:30 PM	SiCl4 pre valve closed
10/11/2011	4:17:30 PM	SiCl4 post valve closed
10/11/2011	4:17:30 PM	Main Vac valve closed
10/11/2011	4:17:30 PM	Bypass valve closed
10/11/2011	4:17:30 PM	H2 valve opened
10/11/2011	4:17:30 PM	Bubbler valve opened
10/11/2011	4:17:30 PM	Helium MFC set to  0.000000
10/11/2011	4:17:30 PM	H2 MFC set to  500.000000
10/11/2011	4:17:30 PM	BCl3 MFC set to  0.000000
10/11/2011	4:17:30 PM	PHl3 MFC set to  0.000000
10/11/2011	4:17:30 PM	SiCl4 MFC set to  0.000000
10/11/2011	4:17:30 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	4:17:30 PM	Tube furnace set to 750
10/11/2011	4:22:30 PM	H2 valve closed
10/11/2011	4:22:30 PM	BCl3 valve closed
10/11/2011	4:22:30 PM	PH3 valve closed
10/11/2011	4:22:30 PM	SiCl4 pre valve closed
10/11/2011	4:22:30 PM	SiCl4 post valve closed
10/11/2011	4:22:30 PM	Main Vac valve closed
10/11/2011	4:22:30 PM	Bypass valve closed
10/11/2011	4:22:30 PM	Helium valve opened
10/11/2011	4:22:30 PM	Bubbler valve opened
10/11/2011	4:22:30 PM	Helium MFC set to  400.000000
10/11/2011	4:22:30 PM	H2 MFC set to  0.000000
10/11/2011	4:22:30 PM	BCl3 MFC set to  0.000000
10/11/2011	4:22:30 PM	PHl3 MFC set to  0.000000
10/11/2011	4:22:30 PM	SiCl4 MFC set to  0.000000
10/11/2011	4:22:30 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	4:22:30 PM	Tube furnace set to 0
10/11/2011	4:42:30 PM	Helium valve closed
10/11/2011	4:42:30 PM	H2 valve closed
10/11/2011	4:42:30 PM	BCl3 valve closed
10/11/2011	4:42:30 PM	PH3 valve closed
10/11/2011	4:42:30 PM	SiCl4 pre valve closed
10/11/2011	4:42:30 PM	SiCl4 post valve closed
10/11/2011	4:42:30 PM	Main Vac valve closed
10/11/2011	4:42:30 PM	Bypass valve closed
10/11/2011	4:42:30 PM	Bubbler valve closed
10/11/2011	4:42:30 PM	Helium MFC set to  0.000000
10/11/2011	4:42:30 PM	H2 MFC set to  0.000000
10/11/2011	4:42:30 PM	BCl3 MFC set to  0.000000
10/11/2011	4:42:30 PM	PHl3 MFC set to  0.000000
10/11/2011	4:42:30 PM	SiCl4 MFC set to  0.000000
10/11/2011	4:42:30 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	4:42:30 PM	Tube furnace set to 0
10/11/2011	4:48:48 PM	Run finished at 4:48 PM
10/11/2011	4:48:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	4:48:52 PM	Recipe started at 4:48 PM
10/11/2011	4:48:52 PM	Helium valve closed
10/11/2011	4:48:52 PM	H2 valve closed
10/11/2011	4:48:52 PM	BCl3 valve closed
10/11/2011	4:48:52 PM	PH3 valve closed
10/11/2011	4:48:52 PM	SiCl4 pre valve closed
10/11/2011	4:48:52 PM	SiCl4 post valve closed
10/11/2011	4:48:52 PM	Main Vac valve closed
10/11/2011	4:48:52 PM	Bubbler valve closed
10/11/2011	4:48:52 PM	Bypass valve opened
10/11/2011	4:48:52 PM	Helium MFC set to  0.000000
10/11/2011	4:48:52 PM	H2 MFC set to  0.000000
10/11/2011	4:48:52 PM	BCl3 MFC set to  0.000000
10/11/2011	4:48:52 PM	PHl3 MFC set to  0.000000
10/11/2011	4:48:52 PM	SiCl4 MFC set to  0.000000
10/11/2011	4:48:52 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	4:48:52 PM	Tube furnace set to 0
10/11/2011	4:49:36 PM	Run aborted at 4:49 PM
10/11/2011	4:49:36 PM	Helium valve closed
10/11/2011	4:49:36 PM	H2 valve closed
10/11/2011	4:49:36 PM	BCl3 valve closed
10/11/2011	4:49:36 PM	PH3 valve closed
10/11/2011	4:49:36 PM	SiCl4 pre valve closed
10/11/2011	4:49:36 PM	SiCl4 post valve closed
10/11/2011	4:49:36 PM	Bypass valve closed
10/11/2011	4:49:36 PM	Main Vac valve closed
10/11/2011	4:49:36 PM	Bubbler valve closed
10/11/2011	4:49:36 PM	Helium MFC set to  0.000000
10/11/2011	4:49:36 PM	H2 MFC set to  0.000000
10/11/2011	4:49:36 PM	BCl3 MFC set to  0.000000
10/11/2011	4:49:36 PM	PHl3 MFC set to  0.000000
10/11/2011	4:49:36 PM	SiCl4 MFC set to  0.000000
10/11/2011	4:49:36 PM	Tube furnace set to 0
10/11/2011	4:49:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	4:49:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	4:49:39 PM	Recipe started at 4:49 PM
10/11/2011	4:49:39 PM	Helium valve closed
10/11/2011	4:49:39 PM	H2 valve closed
10/11/2011	4:49:39 PM	BCl3 valve closed
10/11/2011	4:49:39 PM	PH3 valve closed
10/11/2011	4:49:39 PM	SiCl4 pre valve closed
10/11/2011	4:49:39 PM	SiCl4 post valve closed
10/11/2011	4:49:39 PM	Main Vac valve closed
10/11/2011	4:49:39 PM	Bypass valve closed
10/11/2011	4:49:39 PM	Bubbler valve closed
10/11/2011	4:49:39 PM	Helium MFC set to  0.000000
10/11/2011	4:49:39 PM	H2 MFC set to  0.000000
10/11/2011	4:49:39 PM	BCl3 MFC set to  0.000000
10/11/2011	4:49:39 PM	PHl3 MFC set to  0.000000
10/11/2011	4:49:39 PM	SiCl4 MFC set to  0.000000
10/11/2011	4:49:39 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	4:49:39 PM	Tube furnace set to 0
10/11/2011	4:49:42 PM	H2 valve closed
10/11/2011	4:49:42 PM	BCl3 valve closed
10/11/2011	4:49:42 PM	PH3 valve closed
10/11/2011	4:49:42 PM	SiCl4 pre valve closed
10/11/2011	4:49:42 PM	SiCl4 post valve closed
10/11/2011	4:49:42 PM	Main Vac valve closed
10/11/2011	4:49:42 PM	Bypass valve closed
10/11/2011	4:49:42 PM	Bubbler valve closed
10/11/2011	4:49:42 PM	Helium valve opened
10/11/2011	4:49:42 PM	Helium MFC set to  500.000000
10/11/2011	4:49:42 PM	H2 MFC set to  0.000000
10/11/2011	4:49:42 PM	BCl3 MFC set to  0.000000
10/11/2011	4:49:42 PM	PHl3 MFC set to  0.000000
10/11/2011	4:49:42 PM	SiCl4 MFC set to  0.000000
10/11/2011	4:49:42 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	4:49:42 PM	Tube furnace set to 0
10/11/2011	4:50:45 PM	Helium valve closed
10/11/2011	4:50:45 PM	H2 valve closed
10/11/2011	4:50:45 PM	BCl3 valve closed
10/11/2011	4:50:45 PM	PH3 valve closed
10/11/2011	4:50:45 PM	SiCl4 pre valve closed
10/11/2011	4:50:45 PM	SiCl4 post valve closed
10/11/2011	4:50:45 PM	Main Vac valve closed
10/11/2011	4:50:45 PM	Bypass valve closed
10/11/2011	4:50:45 PM	Bubbler valve closed
10/11/2011	4:50:45 PM	Helium MFC set to  0.000000
10/11/2011	4:50:45 PM	H2 MFC set to  0.000000
10/11/2011	4:50:45 PM	BCl3 MFC set to  0.000000
10/11/2011	4:50:45 PM	PHl3 MFC set to  0.000000
10/11/2011	4:50:45 PM	SiCl4 MFC set to  0.000000
10/11/2011	4:50:45 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	4:50:45 PM	Tube furnace set to 0
10/11/2011	4:50:46 PM	Run finished at 4:50 PM
10/11/2011	4:50:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	4:55:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	4:55:25 PM	Recipe started at 4:55 PM
10/11/2011	4:55:25 PM	Helium valve closed
10/11/2011	4:55:25 PM	H2 valve closed
10/11/2011	4:55:25 PM	BCl3 valve closed
10/11/2011	4:55:25 PM	PH3 valve closed
10/11/2011	4:55:25 PM	SiCl4 pre valve closed
10/11/2011	4:55:25 PM	SiCl4 post valve closed
10/11/2011	4:55:25 PM	Main Vac valve closed
10/11/2011	4:55:25 PM	Bubbler valve closed
10/11/2011	4:55:25 PM	Bypass valve opened
10/11/2011	4:55:25 PM	Helium MFC set to  0.000000
10/11/2011	4:55:25 PM	H2 MFC set to  0.000000
10/11/2011	4:55:25 PM	BCl3 MFC set to  0.000000
10/11/2011	4:55:25 PM	PHl3 MFC set to  0.000000
10/11/2011	4:55:25 PM	SiCl4 MFC set to  0.000000
10/11/2011	4:55:25 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	4:55:25 PM	Tube furnace set to 0
10/11/2011	4:56:28 PM	Helium valve closed
10/11/2011	4:56:28 PM	H2 valve closed
10/11/2011	4:56:28 PM	BCl3 valve closed
10/11/2011	4:56:28 PM	PH3 valve closed
10/11/2011	4:56:28 PM	SiCl4 pre valve closed
10/11/2011	4:56:28 PM	SiCl4 post valve closed
10/11/2011	4:56:28 PM	Main Vac valve closed
10/11/2011	4:56:28 PM	Bubbler valve closed
10/11/2011	4:56:28 PM	Bypass valve opened
10/11/2011	4:56:28 PM	Helium MFC set to  0.000000
10/11/2011	4:56:28 PM	H2 MFC set to  0.000000
10/11/2011	4:56:28 PM	BCl3 MFC set to  0.000000
10/11/2011	4:56:28 PM	PHl3 MFC set to  0.000000
10/11/2011	4:56:28 PM	SiCl4 MFC set to  0.000000
10/11/2011	4:56:28 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	4:56:29 PM	Tube furnace set to 0
10/11/2011	4:57:29 PM	Helium valve closed
10/11/2011	4:57:29 PM	H2 valve closed
10/11/2011	4:57:29 PM	BCl3 valve closed
10/11/2011	4:57:29 PM	PH3 valve closed
10/11/2011	4:57:29 PM	SiCl4 pre valve closed
10/11/2011	4:57:29 PM	SiCl4 post valve closed
10/11/2011	4:57:29 PM	Bypass valve closed
10/11/2011	4:57:29 PM	Bubbler valve closed
10/11/2011	4:57:29 PM	Main Vac valve opened
10/11/2011	4:57:29 PM	Helium MFC set to  0.000000
10/11/2011	4:57:29 PM	H2 MFC set to  0.000000
10/11/2011	4:57:29 PM	BCl3 MFC set to  0.000000
10/11/2011	4:57:29 PM	PHl3 MFC set to  0.000000
10/11/2011	4:57:29 PM	SiCl4 MFC set to  0.000000
10/11/2011	4:57:29 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	4:57:29 PM	Tube furnace set to 0
10/11/2011	4:57:30 PM	Run finished at 4:57 PM
10/11/2011	4:57:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	5:30:06 PM	Main Vac valve closed
10/11/2011	5:30:28 PM	Main Vac valve opened
10/11/2011	5:30:37 PM	Helium MFC set to  10.000000
10/11/2011	5:30:38 PM	Helium valve opened
10/11/2011	5:33:20 PM	Helium valve closed
10/11/2011	5:33:55 PM	Main Vac valve closed
10/11/2011	5:34:18 PM	Main Vac valve opened
10/11/2011	5:34:30 PM	Helium valve opened
10/11/2011	5:36:02 PM	Helium valve closed
10/11/2011	5:37:06 PM	Main Vac valve closed
10/11/2011	5:37:27 PM	Main Vac valve opened
10/11/2011	5:37:45 PM	Helium valve opened
10/11/2011	5:38:16 PM	Helium valve closed
10/11/2011	5:38:22 PM	Helium MFC set to  0.000000
10/11/2011	5:39:35 PM	Main Vac valve closed
10/11/2011	5:39:48 PM	Main Vac valve opened
10/11/2011	5:40:20 PM	Recipe started at 5:40 PM
10/11/2011	5:40:20 PM	Helium valve closed
10/11/2011	5:40:20 PM	H2 valve closed
10/11/2011	5:40:20 PM	BCl3 valve closed
10/11/2011	5:40:20 PM	PH3 valve closed
10/11/2011	5:40:20 PM	SiCl4 pre valve closed
10/11/2011	5:40:20 PM	SiCl4 post valve closed
10/11/2011	5:40:20 PM	Main Vac valve closed
10/11/2011	5:40:20 PM	Bypass valve closed
10/11/2011	5:40:20 PM	Bubbler valve closed
10/11/2011	5:40:20 PM	Helium MFC set to  0.000000
10/11/2011	5:40:20 PM	H2 MFC set to  0.000000
10/11/2011	5:40:20 PM	BCl3 MFC set to  0.000000
10/11/2011	5:40:20 PM	PHl3 MFC set to  0.000000
10/11/2011	5:40:20 PM	SiCl4 MFC set to  0.000000
10/11/2011	5:40:20 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	5:40:20 PM	Tube furnace set to 0
10/11/2011	5:40:23 PM	Helium valve closed
10/11/2011	5:40:23 PM	BCl3 valve closed
10/11/2011	5:40:23 PM	PH3 valve closed
10/11/2011	5:40:23 PM	SiCl4 pre valve closed
10/11/2011	5:40:23 PM	SiCl4 post valve closed
10/11/2011	5:40:23 PM	Main Vac valve closed
10/11/2011	5:40:23 PM	Bypass valve closed
10/11/2011	5:40:23 PM	Bubbler valve closed
10/11/2011	5:40:23 PM	H2 valve opened
10/11/2011	5:40:23 PM	Helium MFC set to  0.000000
10/11/2011	5:40:23 PM	H2 MFC set to  500.000000
10/11/2011	5:40:23 PM	BCl3 MFC set to  0.000000
10/11/2011	5:40:23 PM	PHl3 MFC set to  0.000000
10/11/2011	5:40:23 PM	SiCl4 MFC set to  0.000000
10/11/2011	5:40:23 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	5:40:24 PM	Tube furnace set to 0
10/11/2011	5:41:28 PM	Helium valve closed
10/11/2011	5:41:28 PM	BCl3 valve closed
10/11/2011	5:41:28 PM	PH3 valve closed
10/11/2011	5:41:28 PM	SiCl4 pre valve closed
10/11/2011	5:41:28 PM	SiCl4 post valve closed
10/11/2011	5:41:28 PM	Main Vac valve closed
10/11/2011	5:41:28 PM	Bypass valve closed
10/11/2011	5:41:28 PM	H2 valve opened
10/11/2011	5:41:28 PM	Bubbler valve opened
10/11/2011	5:41:28 PM	Helium MFC set to  0.000000
10/11/2011	5:41:28 PM	H2 MFC set to  500.000000
10/11/2011	5:41:28 PM	BCl3 MFC set to  0.000000
10/11/2011	5:41:28 PM	PHl3 MFC set to  0.000000
10/11/2011	5:41:28 PM	SiCl4 MFC set to  0.000000
10/11/2011	5:41:28 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	5:41:28 PM	Tube furnace set to 0
10/11/2011	5:41:29 PM	Helium valve closed
10/11/2011	5:41:29 PM	BCl3 valve closed
10/11/2011	5:41:29 PM	PH3 valve closed
10/11/2011	5:41:29 PM	SiCl4 pre valve closed
10/11/2011	5:41:29 PM	SiCl4 post valve closed
10/11/2011	5:41:29 PM	Main Vac valve closed
10/11/2011	5:41:29 PM	Bypass valve closed
10/11/2011	5:41:29 PM	H2 valve opened
10/11/2011	5:41:29 PM	Bubbler valve opened
10/11/2011	5:41:29 PM	Helium MFC set to  0.000000
10/11/2011	5:41:29 PM	H2 MFC set to  500.000000
10/11/2011	5:41:29 PM	BCl3 MFC set to  0.000000
10/11/2011	5:41:29 PM	PHl3 MFC set to  0.000000
10/11/2011	5:41:29 PM	SiCl4 MFC set to  0.000000
10/11/2011	5:41:29 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	5:41:29 PM	Tube furnace set to 1000
10/11/2011	6:03:29 PM	Helium valve closed
10/11/2011	6:03:29 PM	PH3 valve closed
10/11/2011	6:03:29 PM	Main Vac valve closed
10/11/2011	6:03:29 PM	Bypass valve closed
10/11/2011	6:03:29 PM	H2 valve opened
10/11/2011	6:03:29 PM	BCl3 valve opened
10/11/2011	6:03:29 PM	SiCl4 pre valve opened
10/11/2011	6:03:29 PM	SiCl4 post valve opened
10/11/2011	6:03:29 PM	Bubbler valve opened
10/11/2011	6:03:29 PM	Helium MFC set to  0.000000
10/11/2011	6:03:29 PM	H2 MFC set to  500.000000
10/11/2011	6:03:29 PM	BCl3 MFC set to  1.600000
10/11/2011	6:03:29 PM	PHl3 MFC set to  0.000000
10/11/2011	6:03:29 PM	SiCl4 MFC set to  40.000000
10/11/2011	6:03:29 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	6:03:29 PM	Tube furnace set to 1000
10/11/2011	6:08:29 PM	Helium valve closed
10/11/2011	6:08:29 PM	BCl3 valve closed
10/11/2011	6:08:29 PM	PH3 valve closed
10/11/2011	6:08:29 PM	SiCl4 pre valve closed
10/11/2011	6:08:29 PM	SiCl4 post valve closed
10/11/2011	6:08:29 PM	Main Vac valve closed
10/11/2011	6:08:29 PM	Bypass valve closed
10/11/2011	6:08:29 PM	H2 valve opened
10/11/2011	6:08:29 PM	Bubbler valve opened
10/11/2011	6:08:29 PM	Helium MFC set to  0.000000
10/11/2011	6:08:29 PM	H2 MFC set to  500.000000
10/11/2011	6:08:29 PM	BCl3 MFC set to  0.000000
10/11/2011	6:08:29 PM	PHl3 MFC set to  0.000000
10/11/2011	6:08:29 PM	SiCl4 MFC set to  0.000000
10/11/2011	6:08:29 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	6:08:29 PM	Tube furnace set to 750
10/11/2011	6:13:29 PM	H2 valve closed
10/11/2011	6:13:29 PM	BCl3 valve closed
10/11/2011	6:13:29 PM	PH3 valve closed
10/11/2011	6:13:29 PM	SiCl4 pre valve closed
10/11/2011	6:13:29 PM	SiCl4 post valve closed
10/11/2011	6:13:29 PM	Main Vac valve closed
10/11/2011	6:13:29 PM	Bypass valve closed
10/11/2011	6:13:29 PM	Helium valve opened
10/11/2011	6:13:29 PM	Bubbler valve opened
10/11/2011	6:13:29 PM	Helium MFC set to  400.000000
10/11/2011	6:13:29 PM	H2 MFC set to  0.000000
10/11/2011	6:13:29 PM	BCl3 MFC set to  0.000000
10/11/2011	6:13:29 PM	PHl3 MFC set to  0.000000
10/11/2011	6:13:29 PM	SiCl4 MFC set to  0.000000
10/11/2011	6:13:29 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	6:13:29 PM	Tube furnace set to 0
10/11/2011	6:33:29 PM	Helium valve closed
10/11/2011	6:33:29 PM	H2 valve closed
10/11/2011	6:33:29 PM	BCl3 valve closed
10/11/2011	6:33:29 PM	PH3 valve closed
10/11/2011	6:33:29 PM	SiCl4 pre valve closed
10/11/2011	6:33:29 PM	SiCl4 post valve closed
10/11/2011	6:33:29 PM	Main Vac valve closed
10/11/2011	6:33:29 PM	Bypass valve closed
10/11/2011	6:33:29 PM	Bubbler valve closed
10/11/2011	6:33:29 PM	Helium MFC set to  0.000000
10/11/2011	6:33:29 PM	H2 MFC set to  0.000000
10/11/2011	6:33:29 PM	BCl3 MFC set to  0.000000
10/11/2011	6:33:29 PM	PHl3 MFC set to  0.000000
10/11/2011	6:33:29 PM	SiCl4 MFC set to  0.000000
10/11/2011	6:33:29 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	6:33:30 PM	Tube furnace set to 0
10/11/2011	6:34:14 PM	Run finished at 6:34 PM
10/11/2011	6:35:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	6:35:27 PM	Recipe started at 6:35 PM
10/11/2011	6:35:27 PM	Helium valve closed
10/11/2011	6:35:27 PM	H2 valve closed
10/11/2011	6:35:27 PM	BCl3 valve closed
10/11/2011	6:35:27 PM	PH3 valve closed
10/11/2011	6:35:27 PM	SiCl4 pre valve closed
10/11/2011	6:35:27 PM	SiCl4 post valve closed
10/11/2011	6:35:27 PM	Main Vac valve closed
10/11/2011	6:35:27 PM	Bubbler valve closed
10/11/2011	6:35:27 PM	Bypass valve opened
10/11/2011	6:35:27 PM	Helium MFC set to  0.000000
10/11/2011	6:35:27 PM	H2 MFC set to  0.000000
10/11/2011	6:35:27 PM	BCl3 MFC set to  0.000000
10/11/2011	6:35:27 PM	PHl3 MFC set to  0.000000
10/11/2011	6:35:27 PM	SiCl4 MFC set to  0.000000
10/11/2011	6:35:27 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	6:35:27 PM	Tube furnace set to 0
10/11/2011	6:36:28 PM	Helium valve closed
10/11/2011	6:36:28 PM	H2 valve closed
10/11/2011	6:36:28 PM	BCl3 valve closed
10/11/2011	6:36:28 PM	PH3 valve closed
10/11/2011	6:36:28 PM	SiCl4 pre valve closed
10/11/2011	6:36:28 PM	SiCl4 post valve closed
10/11/2011	6:36:28 PM	Main Vac valve closed
10/11/2011	6:36:28 PM	Bubbler valve closed
10/11/2011	6:36:28 PM	Bypass valve opened
10/11/2011	6:36:28 PM	Helium MFC set to  0.000000
10/11/2011	6:36:28 PM	H2 MFC set to  0.000000
10/11/2011	6:36:28 PM	BCl3 MFC set to  0.000000
10/11/2011	6:36:28 PM	PHl3 MFC set to  0.000000
10/11/2011	6:36:28 PM	SiCl4 MFC set to  0.000000
10/11/2011	6:36:28 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	6:36:28 PM	Tube furnace set to 0
10/11/2011	6:37:28 PM	Helium valve closed
10/11/2011	6:37:28 PM	H2 valve closed
10/11/2011	6:37:28 PM	BCl3 valve closed
10/11/2011	6:37:28 PM	PH3 valve closed
10/11/2011	6:37:28 PM	SiCl4 pre valve closed
10/11/2011	6:37:28 PM	SiCl4 post valve closed
10/11/2011	6:37:28 PM	Bypass valve closed
10/11/2011	6:37:28 PM	Bubbler valve closed
10/11/2011	6:37:28 PM	Main Vac valve opened
10/11/2011	6:37:28 PM	Helium MFC set to  0.000000
10/11/2011	6:37:28 PM	H2 MFC set to  0.000000
10/11/2011	6:37:28 PM	BCl3 MFC set to  0.000000
10/11/2011	6:37:28 PM	PHl3 MFC set to  0.000000
10/11/2011	6:37:28 PM	SiCl4 MFC set to  0.000000
10/11/2011	6:37:28 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	6:37:28 PM	Tube furnace set to 0
10/11/2011	6:37:29 PM	Run finished at 6:37 PM
10/11/2011	6:37:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	6:56:58 PM	Main Vac valve closed
10/11/2011	6:57:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	6:57:04 PM	Recipe started at 6:57 PM
10/11/2011	6:57:04 PM	Helium valve closed
10/11/2011	6:57:04 PM	H2 valve closed
10/11/2011	6:57:04 PM	BCl3 valve closed
10/11/2011	6:57:04 PM	PH3 valve closed
10/11/2011	6:57:04 PM	SiCl4 pre valve closed
10/11/2011	6:57:04 PM	SiCl4 post valve closed
10/11/2011	6:57:04 PM	Main Vac valve closed
10/11/2011	6:57:04 PM	Bypass valve closed
10/11/2011	6:57:04 PM	Bubbler valve closed
10/11/2011	6:57:04 PM	Helium MFC set to  0.000000
10/11/2011	6:57:04 PM	H2 MFC set to  0.000000
10/11/2011	6:57:04 PM	BCl3 MFC set to  0.000000
10/11/2011	6:57:04 PM	PHl3 MFC set to  0.000000
10/11/2011	6:57:04 PM	SiCl4 MFC set to  0.000000
10/11/2011	6:57:04 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	6:57:04 PM	Tube furnace set to 0
10/11/2011	6:57:07 PM	H2 valve closed
10/11/2011	6:57:07 PM	BCl3 valve closed
10/11/2011	6:57:07 PM	PH3 valve closed
10/11/2011	6:57:07 PM	SiCl4 pre valve closed
10/11/2011	6:57:07 PM	SiCl4 post valve closed
10/11/2011	6:57:07 PM	Main Vac valve closed
10/11/2011	6:57:07 PM	Bypass valve closed
10/11/2011	6:57:07 PM	Bubbler valve closed
10/11/2011	6:57:07 PM	Helium valve opened
10/11/2011	6:57:07 PM	Helium MFC set to  500.000000
10/11/2011	6:57:07 PM	H2 MFC set to  0.000000
10/11/2011	6:57:07 PM	BCl3 MFC set to  0.000000
10/11/2011	6:57:07 PM	PHl3 MFC set to  0.000000
10/11/2011	6:57:07 PM	SiCl4 MFC set to  0.000000
10/11/2011	6:57:07 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	6:57:07 PM	Tube furnace set to 0
10/11/2011	6:58:08 PM	Helium valve closed
10/11/2011	6:58:08 PM	H2 valve closed
10/11/2011	6:58:08 PM	BCl3 valve closed
10/11/2011	6:58:08 PM	PH3 valve closed
10/11/2011	6:58:08 PM	SiCl4 pre valve closed
10/11/2011	6:58:08 PM	SiCl4 post valve closed
10/11/2011	6:58:08 PM	Main Vac valve closed
10/11/2011	6:58:08 PM	Bypass valve closed
10/11/2011	6:58:08 PM	Bubbler valve closed
10/11/2011	6:58:08 PM	Helium MFC set to  0.000000
10/11/2011	6:58:08 PM	H2 MFC set to  0.000000
10/11/2011	6:58:08 PM	BCl3 MFC set to  0.000000
10/11/2011	6:58:08 PM	PHl3 MFC set to  0.000000
10/11/2011	6:58:08 PM	SiCl4 MFC set to  0.000000
10/11/2011	6:58:09 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	6:58:09 PM	Tube furnace set to 0
10/11/2011	6:58:10 PM	Run finished at 6:58 PM
10/11/2011	6:58:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	7:14:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	7:14:12 PM	Recipe started at 7:14 PM
10/11/2011	7:14:12 PM	Helium valve closed
10/11/2011	7:14:12 PM	H2 valve closed
10/11/2011	7:14:12 PM	BCl3 valve closed
10/11/2011	7:14:12 PM	PH3 valve closed
10/11/2011	7:14:12 PM	SiCl4 pre valve closed
10/11/2011	7:14:12 PM	SiCl4 post valve closed
10/11/2011	7:14:12 PM	Main Vac valve closed
10/11/2011	7:14:12 PM	Bubbler valve closed
10/11/2011	7:14:12 PM	Bypass valve opened
10/11/2011	7:14:12 PM	Helium MFC set to  0.000000
10/11/2011	7:14:12 PM	H2 MFC set to  0.000000
10/11/2011	7:14:12 PM	BCl3 MFC set to  0.000000
10/11/2011	7:14:12 PM	PHl3 MFC set to  0.000000
10/11/2011	7:14:12 PM	SiCl4 MFC set to  0.000000
10/11/2011	7:14:12 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	7:14:12 PM	Tube furnace set to 0
10/11/2011	7:15:23 PM	Helium valve closed
10/11/2011	7:15:23 PM	H2 valve closed
10/11/2011	7:15:23 PM	BCl3 valve closed
10/11/2011	7:15:23 PM	PH3 valve closed
10/11/2011	7:15:23 PM	SiCl4 pre valve closed
10/11/2011	7:15:23 PM	SiCl4 post valve closed
10/11/2011	7:15:24 PM	Main Vac valve closed
10/11/2011	7:15:24 PM	Bubbler valve closed
10/11/2011	7:15:24 PM	Bypass valve opened
10/11/2011	7:15:24 PM	Helium MFC set to  0.000000
10/11/2011	7:15:24 PM	H2 MFC set to  0.000000
10/11/2011	7:15:24 PM	BCl3 MFC set to  0.000000
10/11/2011	7:15:24 PM	PHl3 MFC set to  0.000000
10/11/2011	7:15:24 PM	SiCl4 MFC set to  0.000000
10/11/2011	7:15:24 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	7:15:24 PM	Tube furnace set to 0
10/11/2011	7:16:24 PM	Helium valve closed
10/11/2011	7:16:24 PM	H2 valve closed
10/11/2011	7:16:24 PM	BCl3 valve closed
10/11/2011	7:16:24 PM	PH3 valve closed
10/11/2011	7:16:24 PM	SiCl4 pre valve closed
10/11/2011	7:16:24 PM	SiCl4 post valve closed
10/11/2011	7:16:24 PM	Bypass valve closed
10/11/2011	7:16:24 PM	Bubbler valve closed
10/11/2011	7:16:24 PM	Main Vac valve opened
10/11/2011	7:16:24 PM	Helium MFC set to  0.000000
10/11/2011	7:16:24 PM	H2 MFC set to  0.000000
10/11/2011	7:16:24 PM	BCl3 MFC set to  0.000000
10/11/2011	7:16:24 PM	PHl3 MFC set to  0.000000
10/11/2011	7:16:24 PM	SiCl4 MFC set to  0.000000
10/11/2011	7:16:24 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	7:16:24 PM	Tube furnace set to 0
10/11/2011	7:16:25 PM	Run finished at 7:16 PM
10/11/2011	7:16:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	7:16:31 PM	Tube furnace set to 125
10/11/2011	7:57:09 PM	Main Vac valve closed
10/11/2011	7:57:20 PM	Main Vac valve opened
10/11/2011	7:58:20 PM	Recipe started at 7:58 PM
10/11/2011	7:58:20 PM	Helium valve closed
10/11/2011	7:58:20 PM	H2 valve closed
10/11/2011	7:58:20 PM	BCl3 valve closed
10/11/2011	7:58:20 PM	PH3 valve closed
10/11/2011	7:58:20 PM	SiCl4 pre valve closed
10/11/2011	7:58:20 PM	SiCl4 post valve closed
10/11/2011	7:58:20 PM	Bypass valve closed
10/11/2011	7:58:20 PM	Bubbler valve closed
10/11/2011	7:58:20 PM	Main Vac valve opened
10/11/2011	7:58:20 PM	Helium MFC set to  0.000000
10/11/2011	7:58:20 PM	H2 MFC set to  0.000000
10/11/2011	7:58:20 PM	BCl3 MFC set to  0.000000
10/11/2011	7:58:20 PM	PHl3 MFC set to  0.000000
10/11/2011	7:58:20 PM	SiCl4 MFC set to  0.000000
10/11/2011	7:58:20 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	7:58:20 PM	Tube furnace set to 0
10/11/2011	7:58:50 PM	H2 valve closed
10/11/2011	7:58:50 PM	BCl3 valve closed
10/11/2011	7:58:50 PM	PH3 valve closed
10/11/2011	7:58:50 PM	SiCl4 pre valve closed
10/11/2011	7:58:50 PM	SiCl4 post valve closed
10/11/2011	7:58:50 PM	Bypass valve closed
10/11/2011	7:58:50 PM	Bubbler valve closed
10/11/2011	7:58:50 PM	Helium valve opened
10/11/2011	7:58:50 PM	Main Vac valve opened
10/11/2011	7:58:50 PM	Helium MFC set to  20.000000
10/11/2011	7:58:50 PM	H2 MFC set to  0.000000
10/11/2011	7:58:50 PM	BCl3 MFC set to  0.000000
10/11/2011	7:58:50 PM	PHl3 MFC set to  0.000000
10/11/2011	7:58:50 PM	SiCl4 MFC set to  0.000000
10/11/2011	7:58:50 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	7:58:50 PM	Tube furnace set to 0
10/11/2011	7:59:20 PM	Helium valve closed
10/11/2011	7:59:20 PM	H2 valve closed
10/11/2011	7:59:20 PM	BCl3 valve closed
10/11/2011	7:59:20 PM	PH3 valve closed
10/11/2011	7:59:20 PM	SiCl4 pre valve closed
10/11/2011	7:59:20 PM	SiCl4 post valve closed
10/11/2011	7:59:20 PM	Bypass valve closed
10/11/2011	7:59:20 PM	Bubbler valve closed
10/11/2011	7:59:20 PM	Main Vac valve opened
10/11/2011	7:59:20 PM	Helium MFC set to  0.000000
10/11/2011	7:59:20 PM	H2 MFC set to  0.000000
10/11/2011	7:59:20 PM	BCl3 MFC set to  0.000000
10/11/2011	7:59:20 PM	PHl3 MFC set to  0.000000
10/11/2011	7:59:20 PM	SiCl4 MFC set to  0.000000
10/11/2011	7:59:20 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	7:59:20 PM	Tube furnace set to 0
10/11/2011	7:59:50 PM	H2 valve closed
10/11/2011	7:59:50 PM	BCl3 valve closed
10/11/2011	7:59:50 PM	PH3 valve closed
10/11/2011	7:59:50 PM	SiCl4 pre valve closed
10/11/2011	7:59:50 PM	SiCl4 post valve closed
10/11/2011	7:59:50 PM	Bypass valve closed
10/11/2011	7:59:50 PM	Bubbler valve closed
10/11/2011	7:59:50 PM	Helium valve opened
10/11/2011	7:59:50 PM	Main Vac valve opened
10/11/2011	7:59:50 PM	Helium MFC set to  20.000000
10/11/2011	7:59:50 PM	H2 MFC set to  0.000000
10/11/2011	7:59:50 PM	BCl3 MFC set to  0.000000
10/11/2011	7:59:50 PM	PHl3 MFC set to  0.000000
10/11/2011	7:59:50 PM	SiCl4 MFC set to  0.000000
10/11/2011	7:59:50 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	7:59:51 PM	Tube furnace set to 0
10/11/2011	8:00:21 PM	Helium valve closed
10/11/2011	8:00:21 PM	H2 valve closed
10/11/2011	8:00:21 PM	BCl3 valve closed
10/11/2011	8:00:21 PM	PH3 valve closed
10/11/2011	8:00:21 PM	SiCl4 pre valve closed
10/11/2011	8:00:21 PM	SiCl4 post valve closed
10/11/2011	8:00:21 PM	Bypass valve closed
10/11/2011	8:00:21 PM	Bubbler valve closed
10/11/2011	8:00:21 PM	Main Vac valve opened
10/11/2011	8:00:21 PM	Helium MFC set to  0.000000
10/11/2011	8:00:21 PM	H2 MFC set to  0.000000
10/11/2011	8:00:21 PM	BCl3 MFC set to  0.000000
10/11/2011	8:00:21 PM	PHl3 MFC set to  0.000000
10/11/2011	8:00:21 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:00:21 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:00:21 PM	Tube furnace set to 0
10/11/2011	8:00:51 PM	H2 valve closed
10/11/2011	8:00:51 PM	BCl3 valve closed
10/11/2011	8:00:51 PM	PH3 valve closed
10/11/2011	8:00:51 PM	SiCl4 pre valve closed
10/11/2011	8:00:51 PM	SiCl4 post valve closed
10/11/2011	8:00:51 PM	Bypass valve closed
10/11/2011	8:00:51 PM	Bubbler valve closed
10/11/2011	8:00:51 PM	Helium valve opened
10/11/2011	8:00:51 PM	Main Vac valve opened
10/11/2011	8:00:51 PM	Helium MFC set to  20.000000
10/11/2011	8:00:51 PM	H2 MFC set to  0.000000
10/11/2011	8:00:51 PM	BCl3 MFC set to  0.000000
10/11/2011	8:00:51 PM	PHl3 MFC set to  0.000000
10/11/2011	8:00:51 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:00:51 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:00:51 PM	Tube furnace set to 0
10/11/2011	8:01:21 PM	Helium valve closed
10/11/2011	8:01:21 PM	H2 valve closed
10/11/2011	8:01:21 PM	BCl3 valve closed
10/11/2011	8:01:21 PM	PH3 valve closed
10/11/2011	8:01:21 PM	SiCl4 pre valve closed
10/11/2011	8:01:21 PM	SiCl4 post valve closed
10/11/2011	8:01:21 PM	Bypass valve closed
10/11/2011	8:01:21 PM	Bubbler valve closed
10/11/2011	8:01:21 PM	Main Vac valve opened
10/11/2011	8:01:21 PM	Helium MFC set to  0.000000
10/11/2011	8:01:21 PM	H2 MFC set to  0.000000
10/11/2011	8:01:21 PM	BCl3 MFC set to  0.000000
10/11/2011	8:01:21 PM	PHl3 MFC set to  0.000000
10/11/2011	8:01:21 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:01:21 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:01:21 PM	Tube furnace set to 0
10/11/2011	8:01:51 PM	H2 valve closed
10/11/2011	8:01:51 PM	BCl3 valve closed
10/11/2011	8:01:51 PM	PH3 valve closed
10/11/2011	8:01:51 PM	SiCl4 pre valve closed
10/11/2011	8:01:51 PM	SiCl4 post valve closed
10/11/2011	8:01:51 PM	Bypass valve closed
10/11/2011	8:01:51 PM	Bubbler valve closed
10/11/2011	8:01:51 PM	Helium valve opened
10/11/2011	8:01:51 PM	Main Vac valve opened
10/11/2011	8:01:51 PM	Helium MFC set to  20.000000
10/11/2011	8:01:51 PM	H2 MFC set to  0.000000
10/11/2011	8:01:51 PM	BCl3 MFC set to  0.000000
10/11/2011	8:01:51 PM	PHl3 MFC set to  0.000000
10/11/2011	8:01:51 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:01:51 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:01:51 PM	Tube furnace set to 0
10/11/2011	8:02:21 PM	Helium valve closed
10/11/2011	8:02:21 PM	H2 valve closed
10/11/2011	8:02:21 PM	BCl3 valve closed
10/11/2011	8:02:21 PM	PH3 valve closed
10/11/2011	8:02:21 PM	SiCl4 pre valve closed
10/11/2011	8:02:21 PM	SiCl4 post valve closed
10/11/2011	8:02:21 PM	Bypass valve closed
10/11/2011	8:02:21 PM	Bubbler valve closed
10/11/2011	8:02:21 PM	Main Vac valve opened
10/11/2011	8:02:21 PM	Helium MFC set to  0.000000
10/11/2011	8:02:21 PM	H2 MFC set to  0.000000
10/11/2011	8:02:21 PM	BCl3 MFC set to  0.000000
10/11/2011	8:02:21 PM	PHl3 MFC set to  0.000000
10/11/2011	8:02:21 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:02:21 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:02:22 PM	Tube furnace set to 0
10/11/2011	8:02:52 PM	H2 valve closed
10/11/2011	8:02:52 PM	BCl3 valve closed
10/11/2011	8:02:52 PM	PH3 valve closed
10/11/2011	8:02:52 PM	SiCl4 pre valve closed
10/11/2011	8:02:52 PM	SiCl4 post valve closed
10/11/2011	8:02:52 PM	Bypass valve closed
10/11/2011	8:02:52 PM	Bubbler valve closed
10/11/2011	8:02:52 PM	Helium valve opened
10/11/2011	8:02:52 PM	Main Vac valve opened
10/11/2011	8:02:52 PM	Helium MFC set to  20.000000
10/11/2011	8:02:52 PM	H2 MFC set to  0.000000
10/11/2011	8:02:52 PM	BCl3 MFC set to  0.000000
10/11/2011	8:02:52 PM	PHl3 MFC set to  0.000000
10/11/2011	8:02:52 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:02:52 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:02:52 PM	Tube furnace set to 0
10/11/2011	8:03:22 PM	Helium valve closed
10/11/2011	8:03:22 PM	H2 valve closed
10/11/2011	8:03:22 PM	BCl3 valve closed
10/11/2011	8:03:22 PM	PH3 valve closed
10/11/2011	8:03:22 PM	SiCl4 pre valve closed
10/11/2011	8:03:22 PM	SiCl4 post valve closed
10/11/2011	8:03:22 PM	Bypass valve closed
10/11/2011	8:03:22 PM	Bubbler valve closed
10/11/2011	8:03:22 PM	Main Vac valve opened
10/11/2011	8:03:22 PM	Helium MFC set to  0.000000
10/11/2011	8:03:22 PM	H2 MFC set to  0.000000
10/11/2011	8:03:22 PM	BCl3 MFC set to  0.000000
10/11/2011	8:03:22 PM	PHl3 MFC set to  0.000000
10/11/2011	8:03:22 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:03:22 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:03:22 PM	Tube furnace set to 0
10/11/2011	8:03:52 PM	H2 valve closed
10/11/2011	8:03:52 PM	BCl3 valve closed
10/11/2011	8:03:52 PM	PH3 valve closed
10/11/2011	8:03:52 PM	SiCl4 pre valve closed
10/11/2011	8:03:52 PM	SiCl4 post valve closed
10/11/2011	8:03:52 PM	Bypass valve closed
10/11/2011	8:03:52 PM	Bubbler valve closed
10/11/2011	8:03:52 PM	Helium valve opened
10/11/2011	8:03:52 PM	Main Vac valve opened
10/11/2011	8:03:52 PM	Helium MFC set to  20.000000
10/11/2011	8:03:52 PM	H2 MFC set to  0.000000
10/11/2011	8:03:52 PM	BCl3 MFC set to  0.000000
10/11/2011	8:03:52 PM	PHl3 MFC set to  0.000000
10/11/2011	8:03:52 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:03:52 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:03:52 PM	Tube furnace set to 0
10/11/2011	8:04:22 PM	Helium valve closed
10/11/2011	8:04:22 PM	H2 valve closed
10/11/2011	8:04:22 PM	BCl3 valve closed
10/11/2011	8:04:22 PM	PH3 valve closed
10/11/2011	8:04:22 PM	SiCl4 pre valve closed
10/11/2011	8:04:22 PM	SiCl4 post valve closed
10/11/2011	8:04:22 PM	Bypass valve closed
10/11/2011	8:04:22 PM	Bubbler valve closed
10/11/2011	8:04:22 PM	Main Vac valve opened
10/11/2011	8:04:22 PM	Helium MFC set to  0.000000
10/11/2011	8:04:22 PM	H2 MFC set to  0.000000
10/11/2011	8:04:22 PM	BCl3 MFC set to  0.000000
10/11/2011	8:04:22 PM	PHl3 MFC set to  0.000000
10/11/2011	8:04:22 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:04:22 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:04:22 PM	Tube furnace set to 0
10/11/2011	8:04:52 PM	H2 valve closed
10/11/2011	8:04:52 PM	BCl3 valve closed
10/11/2011	8:04:52 PM	PH3 valve closed
10/11/2011	8:04:52 PM	SiCl4 pre valve closed
10/11/2011	8:04:52 PM	SiCl4 post valve closed
10/11/2011	8:04:52 PM	Bypass valve closed
10/11/2011	8:04:52 PM	Bubbler valve closed
10/11/2011	8:04:52 PM	Helium valve opened
10/11/2011	8:04:52 PM	Main Vac valve opened
10/11/2011	8:04:52 PM	Helium MFC set to  20.000000
10/11/2011	8:04:52 PM	H2 MFC set to  0.000000
10/11/2011	8:04:52 PM	BCl3 MFC set to  0.000000
10/11/2011	8:04:52 PM	PHl3 MFC set to  0.000000
10/11/2011	8:04:52 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:04:52 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:04:53 PM	Tube furnace set to 0
10/11/2011	8:05:23 PM	Helium valve closed
10/11/2011	8:05:23 PM	H2 valve closed
10/11/2011	8:05:23 PM	BCl3 valve closed
10/11/2011	8:05:23 PM	PH3 valve closed
10/11/2011	8:05:23 PM	SiCl4 pre valve closed
10/11/2011	8:05:23 PM	SiCl4 post valve closed
10/11/2011	8:05:23 PM	Bypass valve closed
10/11/2011	8:05:23 PM	Bubbler valve closed
10/11/2011	8:05:23 PM	Main Vac valve opened
10/11/2011	8:05:23 PM	Helium MFC set to  0.000000
10/11/2011	8:05:23 PM	H2 MFC set to  0.000000
10/11/2011	8:05:23 PM	BCl3 MFC set to  0.000000
10/11/2011	8:05:23 PM	PHl3 MFC set to  0.000000
10/11/2011	8:05:23 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:05:23 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:05:23 PM	Tube furnace set to 0
10/11/2011	8:05:53 PM	H2 valve closed
10/11/2011	8:05:53 PM	BCl3 valve closed
10/11/2011	8:05:53 PM	PH3 valve closed
10/11/2011	8:05:53 PM	SiCl4 pre valve closed
10/11/2011	8:05:53 PM	SiCl4 post valve closed
10/11/2011	8:05:53 PM	Bypass valve closed
10/11/2011	8:05:53 PM	Bubbler valve closed
10/11/2011	8:05:53 PM	Helium valve opened
10/11/2011	8:05:53 PM	Main Vac valve opened
10/11/2011	8:05:53 PM	Helium MFC set to  20.000000
10/11/2011	8:05:53 PM	H2 MFC set to  0.000000
10/11/2011	8:05:53 PM	BCl3 MFC set to  0.000000
10/11/2011	8:05:53 PM	PHl3 MFC set to  0.000000
10/11/2011	8:05:53 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:05:53 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:05:53 PM	Tube furnace set to 0
10/11/2011	8:06:23 PM	Helium valve closed
10/11/2011	8:06:23 PM	H2 valve closed
10/11/2011	8:06:23 PM	BCl3 valve closed
10/11/2011	8:06:23 PM	PH3 valve closed
10/11/2011	8:06:23 PM	SiCl4 pre valve closed
10/11/2011	8:06:23 PM	SiCl4 post valve closed
10/11/2011	8:06:23 PM	Bypass valve closed
10/11/2011	8:06:23 PM	Bubbler valve closed
10/11/2011	8:06:23 PM	Main Vac valve opened
10/11/2011	8:06:23 PM	Helium MFC set to  0.000000
10/11/2011	8:06:23 PM	H2 MFC set to  0.000000
10/11/2011	8:06:23 PM	BCl3 MFC set to  0.000000
10/11/2011	8:06:23 PM	PHl3 MFC set to  0.000000
10/11/2011	8:06:23 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:06:23 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:06:23 PM	Tube furnace set to 0
10/11/2011	8:06:53 PM	H2 valve closed
10/11/2011	8:06:53 PM	BCl3 valve closed
10/11/2011	8:06:53 PM	PH3 valve closed
10/11/2011	8:06:53 PM	SiCl4 pre valve closed
10/11/2011	8:06:53 PM	SiCl4 post valve closed
10/11/2011	8:06:53 PM	Bypass valve closed
10/11/2011	8:06:53 PM	Bubbler valve closed
10/11/2011	8:06:53 PM	Helium valve opened
10/11/2011	8:06:53 PM	Main Vac valve opened
10/11/2011	8:06:53 PM	Helium MFC set to  20.000000
10/11/2011	8:06:53 PM	H2 MFC set to  0.000000
10/11/2011	8:06:53 PM	BCl3 MFC set to  0.000000
10/11/2011	8:06:53 PM	PHl3 MFC set to  0.000000
10/11/2011	8:06:53 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:06:53 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:06:53 PM	Tube furnace set to 0
10/11/2011	8:07:23 PM	Helium valve closed
10/11/2011	8:07:23 PM	H2 valve closed
10/11/2011	8:07:23 PM	BCl3 valve closed
10/11/2011	8:07:23 PM	PH3 valve closed
10/11/2011	8:07:23 PM	SiCl4 pre valve closed
10/11/2011	8:07:23 PM	SiCl4 post valve closed
10/11/2011	8:07:23 PM	Bypass valve closed
10/11/2011	8:07:23 PM	Bubbler valve closed
10/11/2011	8:07:23 PM	Main Vac valve opened
10/11/2011	8:07:23 PM	Helium MFC set to  0.000000
10/11/2011	8:07:23 PM	H2 MFC set to  0.000000
10/11/2011	8:07:23 PM	BCl3 MFC set to  0.000000
10/11/2011	8:07:23 PM	PHl3 MFC set to  0.000000
10/11/2011	8:07:23 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:07:23 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:07:24 PM	Tube furnace set to 0
10/11/2011	8:07:54 PM	H2 valve closed
10/11/2011	8:07:54 PM	BCl3 valve closed
10/11/2011	8:07:54 PM	PH3 valve closed
10/11/2011	8:07:54 PM	SiCl4 pre valve closed
10/11/2011	8:07:54 PM	SiCl4 post valve closed
10/11/2011	8:07:54 PM	Bypass valve closed
10/11/2011	8:07:54 PM	Bubbler valve closed
10/11/2011	8:07:54 PM	Helium valve opened
10/11/2011	8:07:54 PM	Main Vac valve opened
10/11/2011	8:07:54 PM	Helium MFC set to  20.000000
10/11/2011	8:07:54 PM	H2 MFC set to  0.000000
10/11/2011	8:07:54 PM	BCl3 MFC set to  0.000000
10/11/2011	8:07:54 PM	PHl3 MFC set to  0.000000
10/11/2011	8:07:54 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:07:54 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:07:54 PM	Tube furnace set to 0
10/11/2011	8:08:24 PM	Helium valve closed
10/11/2011	8:08:24 PM	H2 valve closed
10/11/2011	8:08:24 PM	BCl3 valve closed
10/11/2011	8:08:24 PM	PH3 valve closed
10/11/2011	8:08:24 PM	SiCl4 pre valve closed
10/11/2011	8:08:24 PM	SiCl4 post valve closed
10/11/2011	8:08:24 PM	Bypass valve closed
10/11/2011	8:08:24 PM	Bubbler valve closed
10/11/2011	8:08:24 PM	Main Vac valve opened
10/11/2011	8:08:24 PM	Helium MFC set to  0.000000
10/11/2011	8:08:24 PM	H2 MFC set to  0.000000
10/11/2011	8:08:24 PM	BCl3 MFC set to  0.000000
10/11/2011	8:08:24 PM	PHl3 MFC set to  0.000000
10/11/2011	8:08:24 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:08:24 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:08:24 PM	Tube furnace set to 0
10/11/2011	8:08:25 PM	Run finished at 8:08 PM
10/11/2011	8:24:07 PM	Main Vac valve closed
10/11/2011	8:24:20 PM	Main Vac valve opened
10/11/2011	8:27:29 PM	Recipe started at 8:27 PM
10/11/2011	8:27:29 PM	Helium valve closed
10/11/2011	8:27:29 PM	H2 valve closed
10/11/2011	8:27:29 PM	BCl3 valve closed
10/11/2011	8:27:29 PM	PH3 valve closed
10/11/2011	8:27:29 PM	SiCl4 pre valve closed
10/11/2011	8:27:29 PM	SiCl4 post valve closed
10/11/2011	8:27:29 PM	Main Vac valve closed
10/11/2011	8:27:29 PM	Bypass valve closed
10/11/2011	8:27:29 PM	Bubbler valve closed
10/11/2011	8:27:29 PM	Helium MFC set to  0.000000
10/11/2011	8:27:29 PM	H2 MFC set to  0.000000
10/11/2011	8:27:29 PM	BCl3 MFC set to  0.000000
10/11/2011	8:27:29 PM	PHl3 MFC set to  0.000000
10/11/2011	8:27:29 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:27:29 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:27:29 PM	Tube furnace set to 0
10/11/2011	8:27:32 PM	Helium valve closed
10/11/2011	8:27:32 PM	BCl3 valve closed
10/11/2011	8:27:32 PM	PH3 valve closed
10/11/2011	8:27:32 PM	SiCl4 pre valve closed
10/11/2011	8:27:32 PM	SiCl4 post valve closed
10/11/2011	8:27:32 PM	Main Vac valve closed
10/11/2011	8:27:32 PM	Bypass valve closed
10/11/2011	8:27:32 PM	Bubbler valve closed
10/11/2011	8:27:32 PM	H2 valve opened
10/11/2011	8:27:32 PM	Helium MFC set to  0.000000
10/11/2011	8:27:32 PM	H2 MFC set to  500.000000
10/11/2011	8:27:32 PM	BCl3 MFC set to  0.000000
10/11/2011	8:27:32 PM	PHl3 MFC set to  0.000000
10/11/2011	8:27:32 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:27:32 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:27:32 PM	Tube furnace set to 0
10/11/2011	8:28:38 PM	Helium valve closed
10/11/2011	8:28:38 PM	BCl3 valve closed
10/11/2011	8:28:38 PM	PH3 valve closed
10/11/2011	8:28:38 PM	SiCl4 pre valve closed
10/11/2011	8:28:38 PM	SiCl4 post valve closed
10/11/2011	8:28:38 PM	Main Vac valve closed
10/11/2011	8:28:38 PM	Bypass valve closed
10/11/2011	8:28:38 PM	H2 valve opened
10/11/2011	8:28:38 PM	Bubbler valve opened
10/11/2011	8:28:38 PM	Helium MFC set to  0.000000
10/11/2011	8:28:38 PM	H2 MFC set to  500.000000
10/11/2011	8:28:38 PM	BCl3 MFC set to  0.000000
10/11/2011	8:28:38 PM	PHl3 MFC set to  0.000000
10/11/2011	8:28:38 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:28:38 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:28:38 PM	Tube furnace set to 0
10/11/2011	8:28:39 PM	Helium valve closed
10/11/2011	8:28:39 PM	BCl3 valve closed
10/11/2011	8:28:39 PM	PH3 valve closed
10/11/2011	8:28:39 PM	SiCl4 pre valve closed
10/11/2011	8:28:39 PM	SiCl4 post valve closed
10/11/2011	8:28:39 PM	Main Vac valve closed
10/11/2011	8:28:39 PM	Bypass valve closed
10/11/2011	8:28:39 PM	H2 valve opened
10/11/2011	8:28:39 PM	Bubbler valve opened
10/11/2011	8:28:39 PM	Helium MFC set to  0.000000
10/11/2011	8:28:39 PM	H2 MFC set to  500.000000
10/11/2011	8:28:39 PM	BCl3 MFC set to  0.000000
10/11/2011	8:28:39 PM	PHl3 MFC set to  0.000000
10/11/2011	8:28:39 PM	SiCl4 MFC set to  0.000000
10/11/2011	8:28:39 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:28:39 PM	Tube furnace set to 1000
10/11/2011	8:48:39 PM	Helium valve closed
10/11/2011	8:48:39 PM	BCl3 valve closed
10/11/2011	8:48:39 PM	PH3 valve closed
10/11/2011	8:48:39 PM	Main Vac valve closed
10/11/2011	8:48:39 PM	Bypass valve closed
10/11/2011	8:48:39 PM	H2 valve opened
10/11/2011	8:48:39 PM	SiCl4 pre valve opened
10/11/2011	8:48:39 PM	SiCl4 post valve opened
10/11/2011	8:48:39 PM	Bubbler valve opened
10/11/2011	8:48:39 PM	Helium MFC set to  0.000000
10/11/2011	8:48:39 PM	H2 MFC set to  500.000000
10/11/2011	8:48:39 PM	BCl3 MFC set to  0.000000
10/11/2011	8:48:39 PM	PHl3 MFC set to  0.000000
10/11/2011	8:48:39 PM	SiCl4 MFC set to  50.000000
10/11/2011	8:48:39 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	8:48:39 PM	Tube furnace set to 1000
10/11/2011	9:04:39 PM	Helium valve closed
10/11/2011	9:04:39 PM	BCl3 valve closed
10/11/2011	9:04:39 PM	PH3 valve closed
10/11/2011	9:04:39 PM	SiCl4 pre valve closed
10/11/2011	9:04:39 PM	SiCl4 post valve closed
10/11/2011	9:04:39 PM	Main Vac valve closed
10/11/2011	9:04:39 PM	Bypass valve closed
10/11/2011	9:04:39 PM	H2 valve opened
10/11/2011	9:04:39 PM	Bubbler valve opened
10/11/2011	9:04:39 PM	Helium MFC set to  0.000000
10/11/2011	9:04:39 PM	H2 MFC set to  500.000000
10/11/2011	9:04:39 PM	BCl3 MFC set to  0.000000
10/11/2011	9:04:39 PM	PHl3 MFC set to  0.000000
10/11/2011	9:04:39 PM	SiCl4 MFC set to  0.000000
10/11/2011	9:04:39 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	9:04:40 PM	Tube furnace set to 750
10/11/2011	9:09:40 PM	H2 valve closed
10/11/2011	9:09:40 PM	BCl3 valve closed
10/11/2011	9:09:40 PM	PH3 valve closed
10/11/2011	9:09:40 PM	SiCl4 pre valve closed
10/11/2011	9:09:40 PM	SiCl4 post valve closed
10/11/2011	9:09:40 PM	Main Vac valve closed
10/11/2011	9:09:40 PM	Bypass valve closed
10/11/2011	9:09:40 PM	Helium valve opened
10/11/2011	9:09:40 PM	Bubbler valve opened
10/11/2011	9:09:40 PM	Helium MFC set to  500.000000
10/11/2011	9:09:40 PM	H2 MFC set to  0.000000
10/11/2011	9:09:40 PM	BCl3 MFC set to  0.000000
10/11/2011	9:09:40 PM	PHl3 MFC set to  0.000000
10/11/2011	9:09:40 PM	SiCl4 MFC set to  0.000000
10/11/2011	9:09:40 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	9:09:40 PM	Tube furnace set to 0
10/11/2011	9:29:40 PM	Helium valve closed
10/11/2011	9:29:40 PM	H2 valve closed
10/11/2011	9:29:40 PM	BCl3 valve closed
10/11/2011	9:29:40 PM	PH3 valve closed
10/11/2011	9:29:40 PM	SiCl4 pre valve closed
10/11/2011	9:29:40 PM	SiCl4 post valve closed
10/11/2011	9:29:40 PM	Main Vac valve closed
10/11/2011	9:29:40 PM	Bypass valve closed
10/11/2011	9:29:40 PM	Bubbler valve closed
10/11/2011	9:29:40 PM	Helium MFC set to  0.000000
10/11/2011	9:29:40 PM	H2 MFC set to  0.000000
10/11/2011	9:29:40 PM	BCl3 MFC set to  0.000000
10/11/2011	9:29:40 PM	PHl3 MFC set to  0.000000
10/11/2011	9:29:40 PM	SiCl4 MFC set to  0.000000
10/11/2011	9:29:40 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	9:29:40 PM	Tube furnace set to 0
10/11/2011	9:29:41 PM	Run finished at 9:29 PM
10/11/2011	10:03:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	10:03:45 PM	Recipe started at 10:03 PM
10/11/2011	10:03:45 PM	Helium valve closed
10/11/2011	10:03:45 PM	H2 valve closed
10/11/2011	10:03:45 PM	BCl3 valve closed
10/11/2011	10:03:45 PM	PH3 valve closed
10/11/2011	10:03:45 PM	SiCl4 pre valve closed
10/11/2011	10:03:45 PM	SiCl4 post valve closed
10/11/2011	10:03:45 PM	Main Vac valve closed
10/11/2011	10:03:45 PM	Bypass valve closed
10/11/2011	10:03:45 PM	Bubbler valve closed
10/11/2011	10:03:45 PM	Helium MFC set to  0.000000
10/11/2011	10:03:45 PM	H2 MFC set to  0.000000
10/11/2011	10:03:45 PM	BCl3 MFC set to  0.000000
10/11/2011	10:03:45 PM	PHl3 MFC set to  0.000000
10/11/2011	10:03:45 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:03:46 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:03:46 PM	Tube furnace set to 0
10/11/2011	10:03:49 PM	H2 valve closed
10/11/2011	10:03:49 PM	BCl3 valve closed
10/11/2011	10:03:49 PM	PH3 valve closed
10/11/2011	10:03:49 PM	SiCl4 pre valve closed
10/11/2011	10:03:49 PM	SiCl4 post valve closed
10/11/2011	10:03:49 PM	Main Vac valve closed
10/11/2011	10:03:49 PM	Bypass valve closed
10/11/2011	10:03:49 PM	Bubbler valve closed
10/11/2011	10:03:49 PM	Helium valve opened
10/11/2011	10:03:49 PM	Helium MFC set to  500.000000
10/11/2011	10:03:49 PM	H2 MFC set to  0.000000
10/11/2011	10:03:49 PM	BCl3 MFC set to  0.000000
10/11/2011	10:03:49 PM	PHl3 MFC set to  0.000000
10/11/2011	10:03:49 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:03:49 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:03:49 PM	Tube furnace set to 0
10/11/2011	10:03:50 PM	Helium valve closed
10/11/2011	10:03:50 PM	H2 valve closed
10/11/2011	10:03:50 PM	BCl3 valve closed
10/11/2011	10:03:50 PM	PH3 valve closed
10/11/2011	10:03:50 PM	SiCl4 pre valve closed
10/11/2011	10:03:50 PM	SiCl4 post valve closed
10/11/2011	10:03:50 PM	Main Vac valve closed
10/11/2011	10:03:50 PM	Bypass valve closed
10/11/2011	10:03:50 PM	Bubbler valve closed
10/11/2011	10:03:50 PM	Helium MFC set to  0.000000
10/11/2011	10:03:50 PM	H2 MFC set to  0.000000
10/11/2011	10:03:50 PM	BCl3 MFC set to  0.000000
10/11/2011	10:03:50 PM	PHl3 MFC set to  0.000000
10/11/2011	10:03:50 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:03:50 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:03:51 PM	Tube furnace set to 0
10/11/2011	10:03:52 PM	Run finished at 10:03 PM
10/11/2011	10:03:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	10:11:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	10:11:12 PM	Recipe started at 10:11 PM
10/11/2011	10:11:12 PM	Helium valve closed
10/11/2011	10:11:12 PM	H2 valve closed
10/11/2011	10:11:12 PM	BCl3 valve closed
10/11/2011	10:11:12 PM	PH3 valve closed
10/11/2011	10:11:12 PM	SiCl4 pre valve closed
10/11/2011	10:11:12 PM	SiCl4 post valve closed
10/11/2011	10:11:12 PM	Main Vac valve closed
10/11/2011	10:11:12 PM	Bypass valve closed
10/11/2011	10:11:12 PM	Bubbler valve closed
10/11/2011	10:11:12 PM	Helium MFC set to  0.000000
10/11/2011	10:11:12 PM	H2 MFC set to  0.000000
10/11/2011	10:11:12 PM	BCl3 MFC set to  0.000000
10/11/2011	10:11:12 PM	PHl3 MFC set to  0.000000
10/11/2011	10:11:12 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:11:12 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:11:12 PM	Tube furnace set to 0
10/11/2011	10:11:16 PM	H2 valve closed
10/11/2011	10:11:16 PM	BCl3 valve closed
10/11/2011	10:11:16 PM	PH3 valve closed
10/11/2011	10:11:16 PM	SiCl4 pre valve closed
10/11/2011	10:11:16 PM	SiCl4 post valve closed
10/11/2011	10:11:16 PM	Main Vac valve closed
10/11/2011	10:11:16 PM	Bypass valve closed
10/11/2011	10:11:16 PM	Bubbler valve closed
10/11/2011	10:11:16 PM	Helium valve opened
10/11/2011	10:11:16 PM	Helium MFC set to  500.000000
10/11/2011	10:11:16 PM	H2 MFC set to  0.000000
10/11/2011	10:11:16 PM	BCl3 MFC set to  0.000000
10/11/2011	10:11:16 PM	PHl3 MFC set to  0.000000
10/11/2011	10:11:16 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:11:16 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:11:16 PM	Tube furnace set to 0
10/11/2011	10:11:20 PM	Helium valve closed
10/11/2011	10:11:20 PM	H2 valve closed
10/11/2011	10:11:20 PM	BCl3 valve closed
10/11/2011	10:11:20 PM	PH3 valve closed
10/11/2011	10:11:20 PM	SiCl4 pre valve closed
10/11/2011	10:11:20 PM	SiCl4 post valve closed
10/11/2011	10:11:20 PM	Main Vac valve closed
10/11/2011	10:11:20 PM	Bypass valve closed
10/11/2011	10:11:20 PM	Bubbler valve closed
10/11/2011	10:11:20 PM	Helium MFC set to  0.000000
10/11/2011	10:11:20 PM	H2 MFC set to  0.000000
10/11/2011	10:11:20 PM	BCl3 MFC set to  0.000000
10/11/2011	10:11:20 PM	PHl3 MFC set to  0.000000
10/11/2011	10:11:20 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:11:20 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:11:20 PM	Tube furnace set to 0
10/11/2011	10:11:21 PM	Run finished at 10:11 PM
10/11/2011	10:11:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/11/2011	10:16:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	10:16:37 PM	Recipe started at 10:16 PM
10/11/2011	10:16:37 PM	Helium valve closed
10/11/2011	10:16:37 PM	H2 valve closed
10/11/2011	10:16:37 PM	BCl3 valve closed
10/11/2011	10:16:37 PM	PH3 valve closed
10/11/2011	10:16:37 PM	SiCl4 pre valve closed
10/11/2011	10:16:37 PM	SiCl4 post valve closed
10/11/2011	10:16:37 PM	Main Vac valve closed
10/11/2011	10:16:37 PM	Bubbler valve closed
10/11/2011	10:16:37 PM	Bypass valve opened
10/11/2011	10:16:37 PM	Helium MFC set to  0.000000
10/11/2011	10:16:37 PM	H2 MFC set to  0.000000
10/11/2011	10:16:37 PM	BCl3 MFC set to  0.000000
10/11/2011	10:16:37 PM	PHl3 MFC set to  0.000000
10/11/2011	10:16:37 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:16:37 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:16:37 PM	Tube furnace set to 0
10/11/2011	10:17:44 PM	Helium valve closed
10/11/2011	10:17:44 PM	H2 valve closed
10/11/2011	10:17:44 PM	BCl3 valve closed
10/11/2011	10:17:44 PM	PH3 valve closed
10/11/2011	10:17:44 PM	SiCl4 pre valve closed
10/11/2011	10:17:44 PM	SiCl4 post valve closed
10/11/2011	10:17:44 PM	Main Vac valve closed
10/11/2011	10:17:44 PM	Bubbler valve closed
10/11/2011	10:17:44 PM	Bypass valve opened
10/11/2011	10:17:44 PM	Helium MFC set to  0.000000
10/11/2011	10:17:44 PM	H2 MFC set to  0.000000
10/11/2011	10:17:44 PM	BCl3 MFC set to  0.000000
10/11/2011	10:17:44 PM	PHl3 MFC set to  0.000000
10/11/2011	10:17:44 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:17:44 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:17:44 PM	Tube furnace set to 0
10/11/2011	10:18:44 PM	Helium valve closed
10/11/2011	10:18:44 PM	H2 valve closed
10/11/2011	10:18:44 PM	BCl3 valve closed
10/11/2011	10:18:44 PM	PH3 valve closed
10/11/2011	10:18:44 PM	SiCl4 pre valve closed
10/11/2011	10:18:44 PM	SiCl4 post valve closed
10/11/2011	10:18:44 PM	Bypass valve closed
10/11/2011	10:18:44 PM	Bubbler valve closed
10/11/2011	10:18:44 PM	Main Vac valve opened
10/11/2011	10:18:44 PM	Helium MFC set to  0.000000
10/11/2011	10:18:44 PM	H2 MFC set to  0.000000
10/11/2011	10:18:44 PM	BCl3 MFC set to  0.000000
10/11/2011	10:18:44 PM	PHl3 MFC set to  0.000000
10/11/2011	10:18:44 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:18:44 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:18:44 PM	Tube furnace set to 0
10/11/2011	10:18:45 PM	Run finished at 10:18 PM
10/11/2011	10:18:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/11/2011	10:45:18 PM	Main Vac valve closed
10/11/2011	10:45:38 PM	Program exited cleanly
10/11/2011	10:46:39 PM	Program started normally
10/11/2011	10:46:40 PM	Helium valve closed
10/11/2011	10:46:40 PM	H2 valve closed
10/11/2011	10:46:40 PM	BCl3 valve closed
10/11/2011	10:46:40 PM	PH3 valve closed
10/11/2011	10:46:40 PM	SiCl4 pre valve closed
10/11/2011	10:46:40 PM	SiCl4 post valve closed
10/11/2011	10:46:40 PM	Main Vac valve closed
10/11/2011	10:46:40 PM	Bypass valve closed
10/11/2011	10:46:40 PM	Bubbler valve closed
10/11/2011	10:46:40 PM	Helium MFC set to  0.000000
10/11/2011	10:46:40 PM	H2 MFC set to  0.000000
10/11/2011	10:46:40 PM	BCl3 MFC set to  0.000000
10/11/2011	10:46:40 PM	PHl3 MFC set to  0.000000
10/11/2011	10:46:40 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:46:40 PM	Bypass solenoid MFC set to  760.000000
10/11/2011	10:46:40 PM	Tube furnace set to 0
10/11/2011	10:46:55 PM	Main Vac valve opened
10/11/2011	10:47:52 PM	Program exited cleanly
10/11/2011	10:48:23 PM	Program started normally
10/11/2011	10:48:23 PM	Helium valve closed
10/11/2011	10:48:23 PM	H2 valve closed
10/11/2011	10:48:23 PM	BCl3 valve closed
10/11/2011	10:48:23 PM	PH3 valve closed
10/11/2011	10:48:23 PM	SiCl4 pre valve closed
10/11/2011	10:48:23 PM	SiCl4 post valve closed
10/11/2011	10:48:23 PM	Main Vac valve closed
10/11/2011	10:48:23 PM	Bypass valve closed
10/11/2011	10:48:23 PM	Bubbler valve closed
10/11/2011	10:48:23 PM	Helium MFC set to  0.000000
10/11/2011	10:48:23 PM	H2 MFC set to  0.000000
10/11/2011	10:48:23 PM	BCl3 MFC set to  0.000000
10/11/2011	10:48:23 PM	PHl3 MFC set to  0.000000
10/11/2011	10:48:23 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:48:23 PM	Bypass solenoid MFC set to  760.000000
10/11/2011	10:48:24 PM	Tube furnace set to 0
10/11/2011	10:48:25 PM	Main Vac valve opened
10/11/2011	10:49:56 PM	Main Vac valve closed
10/11/2011	10:50:08 PM	Main Vac valve opened
10/11/2011	10:51:54 PM	Recipe started at 10:51 PM
10/11/2011	10:51:54 PM	Helium valve closed
10/11/2011	10:51:54 PM	H2 valve closed
10/11/2011	10:51:54 PM	BCl3 valve closed
10/11/2011	10:51:54 PM	PH3 valve closed
10/11/2011	10:51:54 PM	SiCl4 pre valve closed
10/11/2011	10:51:54 PM	SiCl4 post valve closed
10/11/2011	10:51:54 PM	Bypass valve closed
10/11/2011	10:51:54 PM	Bubbler valve closed
10/11/2011	10:51:54 PM	Main Vac valve opened
10/11/2011	10:51:54 PM	Helium MFC set to  0.000000
10/11/2011	10:51:54 PM	H2 MFC set to  0.000000
10/11/2011	10:51:54 PM	BCl3 MFC set to  0.000000
10/11/2011	10:51:54 PM	PHl3 MFC set to  0.000000
10/11/2011	10:51:54 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:51:54 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:51:54 PM	Tube furnace set to 0
10/11/2011	10:52:24 PM	H2 valve closed
10/11/2011	10:52:24 PM	BCl3 valve closed
10/11/2011	10:52:24 PM	PH3 valve closed
10/11/2011	10:52:24 PM	SiCl4 pre valve closed
10/11/2011	10:52:24 PM	SiCl4 post valve closed
10/11/2011	10:52:24 PM	Bypass valve closed
10/11/2011	10:52:24 PM	Bubbler valve closed
10/11/2011	10:52:24 PM	Helium valve opened
10/11/2011	10:52:24 PM	Main Vac valve opened
10/11/2011	10:52:24 PM	Helium MFC set to  20.000000
10/11/2011	10:52:24 PM	H2 MFC set to  0.000000
10/11/2011	10:52:24 PM	BCl3 MFC set to  0.000000
10/11/2011	10:52:24 PM	PHl3 MFC set to  0.000000
10/11/2011	10:52:24 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:52:24 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:52:24 PM	Tube furnace set to 0
10/11/2011	10:52:54 PM	Helium valve closed
10/11/2011	10:52:54 PM	H2 valve closed
10/11/2011	10:52:54 PM	BCl3 valve closed
10/11/2011	10:52:54 PM	PH3 valve closed
10/11/2011	10:52:54 PM	SiCl4 pre valve closed
10/11/2011	10:52:54 PM	SiCl4 post valve closed
10/11/2011	10:52:54 PM	Bypass valve closed
10/11/2011	10:52:54 PM	Bubbler valve closed
10/11/2011	10:52:54 PM	Main Vac valve opened
10/11/2011	10:52:54 PM	Helium MFC set to  0.000000
10/11/2011	10:52:54 PM	H2 MFC set to  0.000000
10/11/2011	10:52:54 PM	BCl3 MFC set to  0.000000
10/11/2011	10:52:54 PM	PHl3 MFC set to  0.000000
10/11/2011	10:52:54 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:52:54 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:52:54 PM	Tube furnace set to 0
10/11/2011	10:53:24 PM	H2 valve closed
10/11/2011	10:53:24 PM	BCl3 valve closed
10/11/2011	10:53:24 PM	PH3 valve closed
10/11/2011	10:53:24 PM	SiCl4 pre valve closed
10/11/2011	10:53:24 PM	SiCl4 post valve closed
10/11/2011	10:53:24 PM	Bypass valve closed
10/11/2011	10:53:24 PM	Bubbler valve closed
10/11/2011	10:53:24 PM	Helium valve opened
10/11/2011	10:53:24 PM	Main Vac valve opened
10/11/2011	10:53:24 PM	Helium MFC set to  20.000000
10/11/2011	10:53:24 PM	H2 MFC set to  0.000000
10/11/2011	10:53:24 PM	BCl3 MFC set to  0.000000
10/11/2011	10:53:24 PM	PHl3 MFC set to  0.000000
10/11/2011	10:53:24 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:53:24 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:53:24 PM	Tube furnace set to 0
10/11/2011	10:53:55 PM	Helium valve closed
10/11/2011	10:53:55 PM	H2 valve closed
10/11/2011	10:53:55 PM	BCl3 valve closed
10/11/2011	10:53:55 PM	PH3 valve closed
10/11/2011	10:53:55 PM	SiCl4 pre valve closed
10/11/2011	10:53:55 PM	SiCl4 post valve closed
10/11/2011	10:53:55 PM	Bypass valve closed
10/11/2011	10:53:55 PM	Bubbler valve closed
10/11/2011	10:53:55 PM	Main Vac valve opened
10/11/2011	10:53:55 PM	Helium MFC set to  0.000000
10/11/2011	10:53:55 PM	H2 MFC set to  0.000000
10/11/2011	10:53:55 PM	BCl3 MFC set to  0.000000
10/11/2011	10:53:55 PM	PHl3 MFC set to  0.000000
10/11/2011	10:53:55 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:53:55 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:53:55 PM	Tube furnace set to 0
10/11/2011	10:54:25 PM	H2 valve closed
10/11/2011	10:54:25 PM	BCl3 valve closed
10/11/2011	10:54:25 PM	PH3 valve closed
10/11/2011	10:54:25 PM	SiCl4 pre valve closed
10/11/2011	10:54:25 PM	SiCl4 post valve closed
10/11/2011	10:54:25 PM	Bypass valve closed
10/11/2011	10:54:25 PM	Bubbler valve closed
10/11/2011	10:54:25 PM	Helium valve opened
10/11/2011	10:54:25 PM	Main Vac valve opened
10/11/2011	10:54:25 PM	Helium MFC set to  20.000000
10/11/2011	10:54:25 PM	H2 MFC set to  0.000000
10/11/2011	10:54:25 PM	BCl3 MFC set to  0.000000
10/11/2011	10:54:25 PM	PHl3 MFC set to  0.000000
10/11/2011	10:54:25 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:54:25 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:54:25 PM	Tube furnace set to 0
10/11/2011	10:54:55 PM	Helium valve closed
10/11/2011	10:54:55 PM	H2 valve closed
10/11/2011	10:54:55 PM	BCl3 valve closed
10/11/2011	10:54:55 PM	PH3 valve closed
10/11/2011	10:54:55 PM	SiCl4 pre valve closed
10/11/2011	10:54:55 PM	SiCl4 post valve closed
10/11/2011	10:54:55 PM	Bypass valve closed
10/11/2011	10:54:55 PM	Bubbler valve closed
10/11/2011	10:54:55 PM	Main Vac valve opened
10/11/2011	10:54:55 PM	Helium MFC set to  0.000000
10/11/2011	10:54:55 PM	H2 MFC set to  0.000000
10/11/2011	10:54:55 PM	BCl3 MFC set to  0.000000
10/11/2011	10:54:55 PM	PHl3 MFC set to  0.000000
10/11/2011	10:54:55 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:54:55 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:54:55 PM	Tube furnace set to 0
10/11/2011	10:55:25 PM	H2 valve closed
10/11/2011	10:55:25 PM	BCl3 valve closed
10/11/2011	10:55:25 PM	PH3 valve closed
10/11/2011	10:55:25 PM	SiCl4 pre valve closed
10/11/2011	10:55:25 PM	SiCl4 post valve closed
10/11/2011	10:55:25 PM	Bypass valve closed
10/11/2011	10:55:25 PM	Bubbler valve closed
10/11/2011	10:55:25 PM	Helium valve opened
10/11/2011	10:55:25 PM	Main Vac valve opened
10/11/2011	10:55:25 PM	Helium MFC set to  20.000000
10/11/2011	10:55:25 PM	H2 MFC set to  0.000000
10/11/2011	10:55:25 PM	BCl3 MFC set to  0.000000
10/11/2011	10:55:25 PM	PHl3 MFC set to  0.000000
10/11/2011	10:55:25 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:55:25 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:55:25 PM	Tube furnace set to 0
10/11/2011	10:55:55 PM	Helium valve closed
10/11/2011	10:55:55 PM	H2 valve closed
10/11/2011	10:55:55 PM	BCl3 valve closed
10/11/2011	10:55:55 PM	PH3 valve closed
10/11/2011	10:55:55 PM	SiCl4 pre valve closed
10/11/2011	10:55:55 PM	SiCl4 post valve closed
10/11/2011	10:55:55 PM	Bypass valve closed
10/11/2011	10:55:55 PM	Bubbler valve closed
10/11/2011	10:55:55 PM	Main Vac valve opened
10/11/2011	10:55:55 PM	Helium MFC set to  0.000000
10/11/2011	10:55:55 PM	H2 MFC set to  0.000000
10/11/2011	10:55:55 PM	BCl3 MFC set to  0.000000
10/11/2011	10:55:55 PM	PHl3 MFC set to  0.000000
10/11/2011	10:55:55 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:55:55 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:55:55 PM	Tube furnace set to 0
10/11/2011	10:56:25 PM	H2 valve closed
10/11/2011	10:56:25 PM	BCl3 valve closed
10/11/2011	10:56:25 PM	PH3 valve closed
10/11/2011	10:56:25 PM	SiCl4 pre valve closed
10/11/2011	10:56:25 PM	SiCl4 post valve closed
10/11/2011	10:56:25 PM	Bypass valve closed
10/11/2011	10:56:25 PM	Bubbler valve closed
10/11/2011	10:56:26 PM	Helium valve opened
10/11/2011	10:56:26 PM	Main Vac valve opened
10/11/2011	10:56:26 PM	Helium MFC set to  20.000000
10/11/2011	10:56:26 PM	H2 MFC set to  0.000000
10/11/2011	10:56:26 PM	BCl3 MFC set to  0.000000
10/11/2011	10:56:26 PM	PHl3 MFC set to  0.000000
10/11/2011	10:56:26 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:56:26 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:56:26 PM	Tube furnace set to 0
10/11/2011	10:56:56 PM	Helium valve closed
10/11/2011	10:56:56 PM	H2 valve closed
10/11/2011	10:56:56 PM	BCl3 valve closed
10/11/2011	10:56:56 PM	PH3 valve closed
10/11/2011	10:56:56 PM	SiCl4 pre valve closed
10/11/2011	10:56:56 PM	SiCl4 post valve closed
10/11/2011	10:56:56 PM	Bypass valve closed
10/11/2011	10:56:56 PM	Bubbler valve closed
10/11/2011	10:56:56 PM	Main Vac valve opened
10/11/2011	10:56:56 PM	Helium MFC set to  0.000000
10/11/2011	10:56:56 PM	H2 MFC set to  0.000000
10/11/2011	10:56:56 PM	BCl3 MFC set to  0.000000
10/11/2011	10:56:56 PM	PHl3 MFC set to  0.000000
10/11/2011	10:56:56 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:56:56 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:56:56 PM	Tube furnace set to 0
10/11/2011	10:57:26 PM	H2 valve closed
10/11/2011	10:57:26 PM	BCl3 valve closed
10/11/2011	10:57:26 PM	PH3 valve closed
10/11/2011	10:57:26 PM	SiCl4 pre valve closed
10/11/2011	10:57:26 PM	SiCl4 post valve closed
10/11/2011	10:57:26 PM	Bypass valve closed
10/11/2011	10:57:26 PM	Bubbler valve closed
10/11/2011	10:57:26 PM	Helium valve opened
10/11/2011	10:57:26 PM	Main Vac valve opened
10/11/2011	10:57:26 PM	Helium MFC set to  20.000000
10/11/2011	10:57:26 PM	H2 MFC set to  0.000000
10/11/2011	10:57:26 PM	BCl3 MFC set to  0.000000
10/11/2011	10:57:26 PM	PHl3 MFC set to  0.000000
10/11/2011	10:57:26 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:57:26 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:57:26 PM	Tube furnace set to 0
10/11/2011	10:57:56 PM	Helium valve closed
10/11/2011	10:57:56 PM	H2 valve closed
10/11/2011	10:57:56 PM	BCl3 valve closed
10/11/2011	10:57:56 PM	PH3 valve closed
10/11/2011	10:57:56 PM	SiCl4 pre valve closed
10/11/2011	10:57:56 PM	SiCl4 post valve closed
10/11/2011	10:57:56 PM	Bypass valve closed
10/11/2011	10:57:56 PM	Bubbler valve closed
10/11/2011	10:57:56 PM	Main Vac valve opened
10/11/2011	10:57:56 PM	Helium MFC set to  0.000000
10/11/2011	10:57:56 PM	H2 MFC set to  0.000000
10/11/2011	10:57:56 PM	BCl3 MFC set to  0.000000
10/11/2011	10:57:56 PM	PHl3 MFC set to  0.000000
10/11/2011	10:57:56 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:57:56 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:57:56 PM	Tube furnace set to 0
10/11/2011	10:58:26 PM	H2 valve closed
10/11/2011	10:58:26 PM	BCl3 valve closed
10/11/2011	10:58:26 PM	PH3 valve closed
10/11/2011	10:58:26 PM	SiCl4 pre valve closed
10/11/2011	10:58:26 PM	SiCl4 post valve closed
10/11/2011	10:58:26 PM	Bypass valve closed
10/11/2011	10:58:26 PM	Bubbler valve closed
10/11/2011	10:58:26 PM	Helium valve opened
10/11/2011	10:58:26 PM	Main Vac valve opened
10/11/2011	10:58:26 PM	Helium MFC set to  20.000000
10/11/2011	10:58:26 PM	H2 MFC set to  0.000000
10/11/2011	10:58:26 PM	BCl3 MFC set to  0.000000
10/11/2011	10:58:26 PM	PHl3 MFC set to  0.000000
10/11/2011	10:58:26 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:58:26 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:58:26 PM	Tube furnace set to 0
10/11/2011	10:58:56 PM	Helium valve closed
10/11/2011	10:58:56 PM	H2 valve closed
10/11/2011	10:58:56 PM	BCl3 valve closed
10/11/2011	10:58:56 PM	PH3 valve closed
10/11/2011	10:58:56 PM	SiCl4 pre valve closed
10/11/2011	10:58:56 PM	SiCl4 post valve closed
10/11/2011	10:58:56 PM	Bypass valve closed
10/11/2011	10:58:56 PM	Bubbler valve closed
10/11/2011	10:58:56 PM	Main Vac valve opened
10/11/2011	10:58:56 PM	Helium MFC set to  0.000000
10/11/2011	10:58:56 PM	H2 MFC set to  0.000000
10/11/2011	10:58:56 PM	BCl3 MFC set to  0.000000
10/11/2011	10:58:56 PM	PHl3 MFC set to  0.000000
10/11/2011	10:58:56 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:58:57 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:58:57 PM	Tube furnace set to 0
10/11/2011	10:59:27 PM	H2 valve closed
10/11/2011	10:59:27 PM	BCl3 valve closed
10/11/2011	10:59:27 PM	PH3 valve closed
10/11/2011	10:59:27 PM	SiCl4 pre valve closed
10/11/2011	10:59:27 PM	SiCl4 post valve closed
10/11/2011	10:59:27 PM	Bypass valve closed
10/11/2011	10:59:27 PM	Bubbler valve closed
10/11/2011	10:59:27 PM	Helium valve opened
10/11/2011	10:59:27 PM	Main Vac valve opened
10/11/2011	10:59:27 PM	Helium MFC set to  20.000000
10/11/2011	10:59:27 PM	H2 MFC set to  0.000000
10/11/2011	10:59:27 PM	BCl3 MFC set to  0.000000
10/11/2011	10:59:27 PM	PHl3 MFC set to  0.000000
10/11/2011	10:59:27 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:59:27 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:59:27 PM	Tube furnace set to 0
10/11/2011	10:59:57 PM	Helium valve closed
10/11/2011	10:59:57 PM	H2 valve closed
10/11/2011	10:59:57 PM	BCl3 valve closed
10/11/2011	10:59:57 PM	PH3 valve closed
10/11/2011	10:59:57 PM	SiCl4 pre valve closed
10/11/2011	10:59:57 PM	SiCl4 post valve closed
10/11/2011	10:59:57 PM	Bypass valve closed
10/11/2011	10:59:57 PM	Bubbler valve closed
10/11/2011	10:59:57 PM	Main Vac valve opened
10/11/2011	10:59:57 PM	Helium MFC set to  0.000000
10/11/2011	10:59:57 PM	H2 MFC set to  0.000000
10/11/2011	10:59:57 PM	BCl3 MFC set to  0.000000
10/11/2011	10:59:57 PM	PHl3 MFC set to  0.000000
10/11/2011	10:59:57 PM	SiCl4 MFC set to  0.000000
10/11/2011	10:59:57 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	10:59:57 PM	Tube furnace set to 0
10/11/2011	11:00:27 PM	H2 valve closed
10/11/2011	11:00:27 PM	BCl3 valve closed
10/11/2011	11:00:27 PM	PH3 valve closed
10/11/2011	11:00:27 PM	SiCl4 pre valve closed
10/11/2011	11:00:27 PM	SiCl4 post valve closed
10/11/2011	11:00:27 PM	Bypass valve closed
10/11/2011	11:00:27 PM	Bubbler valve closed
10/11/2011	11:00:27 PM	Helium valve opened
10/11/2011	11:00:27 PM	Main Vac valve opened
10/11/2011	11:00:27 PM	Helium MFC set to  20.000000
10/11/2011	11:00:27 PM	H2 MFC set to  0.000000
10/11/2011	11:00:27 PM	BCl3 MFC set to  0.000000
10/11/2011	11:00:27 PM	PHl3 MFC set to  0.000000
10/11/2011	11:00:27 PM	SiCl4 MFC set to  0.000000
10/11/2011	11:00:27 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	11:00:27 PM	Tube furnace set to 0
10/11/2011	11:00:57 PM	Helium valve closed
10/11/2011	11:00:57 PM	H2 valve closed
10/11/2011	11:00:57 PM	BCl3 valve closed
10/11/2011	11:00:57 PM	PH3 valve closed
10/11/2011	11:00:57 PM	SiCl4 pre valve closed
10/11/2011	11:00:57 PM	SiCl4 post valve closed
10/11/2011	11:00:57 PM	Bypass valve closed
10/11/2011	11:00:57 PM	Bubbler valve closed
10/11/2011	11:00:57 PM	Main Vac valve opened
10/11/2011	11:00:57 PM	Helium MFC set to  0.000000
10/11/2011	11:00:57 PM	H2 MFC set to  0.000000
10/11/2011	11:00:57 PM	BCl3 MFC set to  0.000000
10/11/2011	11:00:57 PM	PHl3 MFC set to  0.000000
10/11/2011	11:00:57 PM	SiCl4 MFC set to  0.000000
10/11/2011	11:00:57 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	11:00:58 PM	Tube furnace set to 0
10/11/2011	11:01:28 PM	H2 valve closed
10/11/2011	11:01:28 PM	BCl3 valve closed
10/11/2011	11:01:28 PM	PH3 valve closed
10/11/2011	11:01:28 PM	SiCl4 pre valve closed
10/11/2011	11:01:28 PM	SiCl4 post valve closed
10/11/2011	11:01:28 PM	Bypass valve closed
10/11/2011	11:01:28 PM	Bubbler valve closed
10/11/2011	11:01:28 PM	Helium valve opened
10/11/2011	11:01:28 PM	Main Vac valve opened
10/11/2011	11:01:28 PM	Helium MFC set to  20.000000
10/11/2011	11:01:28 PM	H2 MFC set to  0.000000
10/11/2011	11:01:28 PM	BCl3 MFC set to  0.000000
10/11/2011	11:01:28 PM	PHl3 MFC set to  0.000000
10/11/2011	11:01:28 PM	SiCl4 MFC set to  0.000000
10/11/2011	11:01:28 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	11:01:28 PM	Tube furnace set to 0
10/11/2011	11:01:58 PM	Helium valve closed
10/11/2011	11:01:58 PM	H2 valve closed
10/11/2011	11:01:58 PM	BCl3 valve closed
10/11/2011	11:01:58 PM	PH3 valve closed
10/11/2011	11:01:58 PM	SiCl4 pre valve closed
10/11/2011	11:01:58 PM	SiCl4 post valve closed
10/11/2011	11:01:58 PM	Bypass valve closed
10/11/2011	11:01:58 PM	Bubbler valve closed
10/11/2011	11:01:58 PM	Main Vac valve opened
10/11/2011	11:01:58 PM	Helium MFC set to  0.000000
10/11/2011	11:01:58 PM	H2 MFC set to  0.000000
10/11/2011	11:01:58 PM	BCl3 MFC set to  0.000000
10/11/2011	11:01:58 PM	PHl3 MFC set to  0.000000
10/11/2011	11:01:58 PM	SiCl4 MFC set to  0.000000
10/11/2011	11:01:58 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	11:01:58 PM	Tube furnace set to 0
10/11/2011	11:01:59 PM	Run finished at 11:01 PM
10/11/2011	11:46:43 PM	Main Vac valve closed
10/11/2011	11:46:56 PM	Main Vac valve opened
10/11/2011	11:47:14 PM	Main Vac valve closed
10/11/2011	11:47:31 PM	Main Vac valve opened
10/11/2011	11:49:13 PM	Recipe started at 11:49 PM
10/11/2011	11:49:13 PM	H2 valve closed
10/11/2011	11:49:13 PM	BCl3 valve closed
10/11/2011	11:49:13 PM	PH3 valve closed
10/11/2011	11:49:13 PM	SiCl4 pre valve closed
10/11/2011	11:49:13 PM	SiCl4 post valve closed
10/11/2011	11:49:13 PM	Bypass valve closed
10/11/2011	11:49:13 PM	Bubbler valve closed
10/11/2011	11:49:13 PM	Helium valve opened
10/11/2011	11:49:13 PM	Main Vac valve opened
10/11/2011	11:49:13 PM	Helium MFC set to  10.000000
10/11/2011	11:49:13 PM	H2 MFC set to  0.000000
10/11/2011	11:49:13 PM	BCl3 MFC set to  0.000000
10/11/2011	11:49:13 PM	PHl3 MFC set to  0.000000
10/11/2011	11:49:13 PM	SiCl4 MFC set to  0.000000
10/11/2011	11:49:13 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	11:49:13 PM	Tube furnace set to 180
10/11/2011	11:49:43 PM	Helium valve closed
10/11/2011	11:49:43 PM	H2 valve closed
10/11/2011	11:49:43 PM	BCl3 valve closed
10/11/2011	11:49:43 PM	PH3 valve closed
10/11/2011	11:49:43 PM	SiCl4 pre valve closed
10/11/2011	11:49:43 PM	SiCl4 post valve closed
10/11/2011	11:49:43 PM	Bypass valve closed
10/11/2011	11:49:43 PM	Bubbler valve closed
10/11/2011	11:49:43 PM	Main Vac valve opened
10/11/2011	11:49:43 PM	Helium MFC set to  0.000000
10/11/2011	11:49:43 PM	H2 MFC set to  0.000000
10/11/2011	11:49:43 PM	BCl3 MFC set to  0.000000
10/11/2011	11:49:43 PM	PHl3 MFC set to  0.000000
10/11/2011	11:49:43 PM	SiCl4 MFC set to  0.000000
10/11/2011	11:49:43 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	11:49:43 PM	Tube furnace set to 180
10/11/2011	11:50:13 PM	H2 valve closed
10/11/2011	11:50:13 PM	BCl3 valve closed
10/11/2011	11:50:13 PM	PH3 valve closed
10/11/2011	11:50:13 PM	SiCl4 pre valve closed
10/11/2011	11:50:13 PM	SiCl4 post valve closed
10/11/2011	11:50:13 PM	Bypass valve closed
10/11/2011	11:50:13 PM	Bubbler valve closed
10/11/2011	11:50:13 PM	Helium valve opened
10/11/2011	11:50:13 PM	Main Vac valve opened
10/11/2011	11:50:13 PM	Helium MFC set to  10.000000
10/11/2011	11:50:13 PM	H2 MFC set to  0.000000
10/11/2011	11:50:13 PM	BCl3 MFC set to  0.000000
10/11/2011	11:50:13 PM	PHl3 MFC set to  0.000000
10/11/2011	11:50:13 PM	SiCl4 MFC set to  0.000000
10/11/2011	11:50:13 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	11:50:13 PM	Tube furnace set to 180
10/11/2011	11:50:43 PM	Helium valve closed
10/11/2011	11:50:43 PM	H2 valve closed
10/11/2011	11:50:43 PM	BCl3 valve closed
10/11/2011	11:50:43 PM	PH3 valve closed
10/11/2011	11:50:43 PM	SiCl4 pre valve closed
10/11/2011	11:50:43 PM	SiCl4 post valve closed
10/11/2011	11:50:43 PM	Bypass valve closed
10/11/2011	11:50:43 PM	Bubbler valve closed
10/11/2011	11:50:43 PM	Main Vac valve opened
10/11/2011	11:50:43 PM	Helium MFC set to  0.000000
10/11/2011	11:50:43 PM	H2 MFC set to  0.000000
10/11/2011	11:50:43 PM	BCl3 MFC set to  0.000000
10/11/2011	11:50:43 PM	PHl3 MFC set to  0.000000
10/11/2011	11:50:43 PM	SiCl4 MFC set to  0.000000
10/11/2011	11:50:43 PM	Bypass solenoid MFC set to  0.000000
10/11/2011	11:50:44 PM	Tube furnace set to 180
